Issued Patents All Time
Showing 1–25 of 44 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12340973 | Particle beam system including a multi-beam deflection device and a beam stop, method for operating the particle beam system and associated computer program product | Stefan Schubert, Dieter Schumacher, Erik Essers, Ingo Mueller, Arne Thoma +2 more | 2025-06-24 |
| 12300462 | System comprising a multi-beam particle microscope and method for operating the same | Nico Kaemmer, Christian Crueger | 2025-05-13 |
| 12293896 | Particle beam system | Hans Fritz, Ingo Mueller, Stefan Schubert, Arne Thoma, Andras G. Major | 2025-05-06 |
| 12283457 | Multiple particle beam microscope and associated method with an improved focus setting taking into account an image plane tilt | Nicole Rauwolf, Nico Kaemmer, Michael Behnke, Ingo Mueller, Arne Thoma +2 more | 2025-04-22 |
| 12272519 | Method for area-wise inspecting a sample via a multi-beam particle microscope, computer program product and multi-beam particle microscope for semiconductor sample inspection, and its use | Daniel Boecker | 2025-04-08 |
| 12255040 | Multi-beam particle beam system and method for operating same | Christof Riedesel, Arne Thoma, Georgo Metalidis, Joerg Jacobi, Stefan Schubert +4 more | 2025-03-18 |
| 12249478 | Particle beam system for azimuthal deflection of individual particle beams and method for azimuth correction in a particle beam system | Hans Fritz, Andras G. Major, Arne Thoma, Joerg Jacobi | 2025-03-11 |
| 12119204 | Particle beam system and the use thereof for flexibly setting the current intensity of individual particle beams | Stefan Schubert, Georgo Metalidis, Hans Fritz, Ralf Lenke | 2024-10-15 |
| 12094683 | Method for operating a multi-beam particle beam microscope | Gregor Dellemann, Gunther Scheunert | 2024-09-17 |
| 11935721 | System comprising a multi-beam particle microscope and method for operating the same | Nico Kaemmer, Christian Crueger | 2024-03-19 |
| 11735393 | Method for operating a multi-beam particle beam microscope | Gregor Dellemann, Gunther Scheunert | 2023-08-22 |
| 11728130 | Method of recording an image using a particle microscope | Thomas Korb, Philipp Huethwohl, Jens Timo Neumann, Christof Riedesel, Christian Wojek +2 more | 2023-08-15 |
| 11657999 | Particle beam system and method for the particle-optical examination of an object | Stefan Schubert | 2023-05-23 |
| 11645740 | Method for detector equalization during the imaging of objects with a multi-beam particle microscope | Michael Behnke, Stefan Schubert, Christof Riedesel | 2023-05-09 |
| 11562881 | Charged particle beam system | Stefan Schubert, Ingo Mueller, Joerg Jacobi, Mario Muetzel, Antonio Casares +1 more | 2023-01-24 |
| 11562880 | Particle beam system for adjusting the current of individual particle beams | Hans Fritz, Ingo Mueller, Georgo Metalidis | 2023-01-24 |
| 11521827 | Method of imaging a 2D sample with a multi-beam particle microscope | Anna Lena Eberle | 2022-12-06 |
| 11239053 | Charged particle beam system and method | — | 2022-02-01 |
| 11164715 | Charged particle beam system | Stefan Schubert, Ingo Mueller, Joerg Jacobi, Mario Muetzel, Antonio Casares +1 more | 2021-11-02 |
| 11158482 | Multi-beam particle microscope | Stefan Schubert | 2021-10-26 |
| 11087955 | System combination of a particle beam system and a light-optical system with collinear beam guidance, and use of the system combination | Michael Schall, Joerg Jacobi, Michel Le Maire | 2021-08-10 |
| 11087948 | Multi-beam charged particle system | Thomas Kemen, Christof Riedesel, Ralf Lenke, Joerg Jacobi | 2021-08-10 |
| 11069508 | Method of imaging a 3D sample with a multi-beam particle microscope | Anna Lena Eberle | 2021-07-20 |
| 11049686 | Particle beam system and method for the particle-optical examination of an object | Stefan Schubert | 2021-06-29 |
| 10896800 | Charged particle beam system and method | Christoph Riedesel | 2021-01-19 |