Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11562881 | Charged particle beam system | Dirk Zeidler, Stefan Schubert, Ingo Mueller, Joerg Jacobi, Antonio Casares +1 more | 2023-01-24 |
| 11164715 | Charged particle beam system | Dirk Zeidler, Stefan Schubert, Ingo Mueller, Joerg Jacobi, Antonio Casares +1 more | 2021-11-02 |
| 10811215 | Charged particle beam system | Dirk Zeidler, Stefan Schubert, Ingo Mueller, Joerg Jacobi, Antonio Casares +1 more | 2020-10-20 |
| 9263233 | Charged particle multi-beam inspection system and method of operating the same | Dirk Zeidler, Rainer Knippelmeyer, Thomas Kemen, Stefan Schubert, Nissim Elmaliah +1 more | 2016-02-16 |