Issued Patents All Time
Showing 26–44 of 44 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10811215 | Charged particle beam system | Stefan Schubert, Ingo Mueller, Joerg Jacobi, Mario Muetzel, Antonio Casares +1 more | 2020-10-20 |
| 10741355 | Multi-beam charged particle system | Thomas Kemen, Christof Riedesel, Ralf Lenke, Joerg Jacobi | 2020-08-11 |
| 10600613 | Particle beam system | Thomas Kemen, Christof Riedesel, Ralf Lenke | 2020-03-24 |
| 10535494 | Particle beam system and method for the particle-optical examination of an object | Stefan Schubert | 2020-01-14 |
| 10388487 | Method for operating a multi-beam particle microscope | — | 2019-08-20 |
| 10163603 | Particle beam system and method for the particle-optical examination of an object | Stefan Schubert | 2018-12-25 |
| 10147582 | Particle beam system | Thomas Kemen, Christof Riedesel, Ralf Lenke | 2018-12-04 |
| 10115558 | Methods and devices for charge compensation | Andreas Schmaunz, Markus Esseling | 2018-10-30 |
| 9991089 | Particle beam system and method for operating a particle optical unit | Ingo Mueller, Nicole Rauwolf, Christof Riedesel, Thomas Kemen, Joerg Jacobi +4 more | 2018-06-05 |
| 9799485 | Particle beam system and method for operating a particle optical unit | Ingo Mueller, Nicole Bengesser, Christof Riedesel, Thomas Kemen, Joerg Jacobi +4 more | 2017-10-24 |
| 9653254 | Particle-optical systems and arrangements and particle-optical components for such systems and arrangements | Thomas Kemen, Anger Pascal, Antonio Casares, Christof Riedesel | 2017-05-16 |
| 9552957 | Particle beam system | Thomas Kemen, Christof Riedesel, Ralf Lenke | 2017-01-24 |
| 9384938 | Particle-optical systems and arrangements and particle-optical components for such systems and arrangements | Thomas Kemen, Pascal Anger, Antonio Casares, Christof Riedesel | 2016-07-05 |
| 9349571 | Particle optical system | Thomas Kemen, Pascal Anger, Gerd Benner | 2016-05-24 |
| 9336982 | Method of detecting electrons, an electron-detector and an inspection system | Jörg Jacobi | 2016-05-10 |
| 9263233 | Charged particle multi-beam inspection system and method of operating the same | Rainer Knippelmeyer, Thomas Kemen, Mario Muetzel, Stefan Schubert, Nissim Elmaliah +1 more | 2016-02-16 |
| 8759760 | Inspection system | Ulrike Zeile | 2014-06-24 |
| 8598525 | Particle beam system | Thomas Kemen | 2013-12-03 |
| 6021762 | Seam test on a fuel injection pump, and the fuel injection pump required for applying same | Dieter Schaible, Vito Tricasi | 2000-02-08 |