Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12362131 | Method for inspecting a specimen and charged particle beam device | Pieter Kruit, Ron Naftali, Jürgen Frosien, Ralf Schmid, Roman Barday +1 more | 2025-07-15 |
| 11705301 | Charged particle beam manipulation device and method for manipulating charged particle beamlets | — | 2023-07-18 |
| 11501946 | Method of influencing a charged particle beam, multipole device, and charged particle beam apparatus | Bernd Woellert, Dieter Winkler | 2022-11-15 |
| 11495433 | Charged particle beam apparatus, multi-beamlet assembly, and method of inspecting a specimen | Dieter Winkler, Markus Thomann, Thomas Kemen, Roman Barday | 2022-11-08 |
| 11120965 | Beam blanking device for a multi-beamlet charged particle beam apparatus | Eoin Horgan | 2021-09-14 |
| 10923313 | Charged particle beam device and method of operating a charged particle beam device | — | 2021-02-16 |
| 10784070 | Charged particle beam device, field curvature corrector, and methods of operating a charged particle beam device | Thomas Kemen, Roman Barday | 2020-09-22 |
| 10748743 | Device and method for operating a charged particle device with multiple beamlets | Dieter Winkler, Ralf Schmid | 2020-08-18 |
| 10593509 | Charged particle beam device, multi-beam blanker for a charged particle beam device, and method for operating a charged particle beam device | Dieter Winkler | 2020-03-17 |
| 10483080 | Charged particle beam device, multi-beam blanker for a charged particle beam device, and method for operating a charged particle beam device | Dieter Winkler | 2019-11-19 |
| 9754759 | Electrostatic multipole device, electrostatic multipole arrangement, and method of manufacturing an electrostatic multipole device | Dieter Winkler | 2017-09-05 |
| 9666405 | System for imaging a signal charged particle beam, method for imaging a signal charged particle beam, and charged particle beam device | Stefan Lanio, Jürgen Frosien, Matthias Firnkes | 2017-05-30 |
| 9666406 | Charged particle beam device, system for a charged particle beam device, and method for operating a charged particle beam device | Stefan Lanio, Matthias Firnkes | 2017-05-30 |
| 9620329 | Electrostatic multipole device, electrostatic multipole arrangement, charged particle beam device, and method of manufacturing an electrostatic multipole device | Dieter Winkler | 2017-04-11 |
| 9620328 | Electrostatic multipole device, electrostatic multipole arrangement, charged particle beam device, and method of operating an electrostatic multipole device | — | 2017-04-11 |
| 9305740 | Charged particle beam system and method of operating thereof | Jürgen Frosien | 2016-04-05 |
| 9035249 | Multi-beam system for high throughput EBI | Jürgen Frosien, Dieter Winkler | 2015-05-19 |
| 8569712 | Beam blanker for interrupting a beam of charged particles | Guido Knippels, Fredericus Bernardus Kiewiet, Hendrik Nicolaas Slingerland, Pieter Kruit, Jacques Nonhebel | 2013-10-29 |