Issued Patents All Time
Showing 1–25 of 64 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12362131 | Method for inspecting a specimen and charged particle beam device | Pieter Kruit, Ron Naftali, Ralf Schmid, Benjamin John Cook, Roman Barday +1 more | 2025-07-15 |
| 10699867 | Simplified particle emitter and method of operating thereof | Stefan Lanio | 2020-06-30 |
| 10504683 | Device and method for forming a plurality of charged particle beamlets | — | 2019-12-10 |
| 10453645 | Method for inspecting a specimen and charged particle multi-beam device | Pieter Kruit | 2019-10-22 |
| 10297418 | Method of reducing coma and chromatic aberration in a charged particle beam device, and charged particle beam device | — | 2019-05-21 |
| 9984848 | Multi-beam lens device, charged particle beam device, and method of operating a multi-beam lens device | — | 2018-05-29 |
| 9922796 | Method for inspecting a specimen and charged particle multi-beam device | Pieter Kruit | 2018-03-20 |
| 9666405 | System for imaging a signal charged particle beam, method for imaging a signal charged particle beam, and charged particle beam device | Stefan Lanio, Matthias Firnkes, Benjamin John Cook | 2017-05-30 |
| 9666404 | Charged particle source arrangement for a charged particle beam device, charged particle beam device for sample inspection, and method for providing a primary charged particle beam for sample inspection in a charged particle beam | — | 2017-05-30 |
| 9601303 | Charged particle beam device and method for inspecting and/or imaging a sample | — | 2017-03-21 |
| 9595417 | High resolution charged particle beam device and method of operating the same | — | 2017-03-14 |
| 9589763 | Method for detecting signal charged particles in a charged particle beam device, and charged particle beam device | — | 2017-03-07 |
| 9472373 | Beam separator device, charged particle beam device and methods of operating thereof | Stefan Lanio, John Breuer, Matthias Firnkes, Johannes Hopster | 2016-10-18 |
| 9330884 | Dome detection for charged particle beam device | — | 2016-05-03 |
| 9305740 | Charged particle beam system and method of operating thereof | Benjamin John Cook | 2016-04-05 |
| 9245709 | Charged particle beam specimen inspection system and method for operation thereof | — | 2016-01-26 |
| 9202666 | Method for operating a charged particle beam device with adjustable landing energies | — | 2015-12-01 |
| 9035249 | Multi-beam system for high throughput EBI | Dieter Winkler, Benjamin John Cook | 2015-05-19 |
| 8921804 | High brightness electron gun with moving condenser lens | — | 2014-12-30 |
| 8866102 | Electron beam device with tilting and dispersion compensation, and method of operating same | — | 2014-10-21 |
| 8785879 | Electron beam wafer inspection system and method of operation thereof | — | 2014-07-22 |
| 8378299 | Twin beam charged particle column and method of operating thereof | — | 2013-02-19 |
| 7847266 | Device and method for selecting an emission area of an emission pattern | Fang Zhou | 2010-12-07 |
| 7763866 | Charged particle beam device with aperture | Stefan Lanio, Helmut Banzhof | 2010-07-27 |
| 7679054 | Double stage charged particle beam energy width reduction system for charged particle beam system | Ralf Degenhardt, Stefan Lanio | 2010-03-16 |