Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12412727 | Charged particle beam system, corrector for aberration correction of a charged particle beam, and method thereof | Pieter Kruit | 2025-09-09 |
| 12386164 | Method of determining a brightness of a charged particle beam, method of determining a size of a source of the charged particle beam, and charged particle beam imaging device | Dominik Ehberger, Matthias Firnkes | 2025-08-12 |
| 12308203 | Methods of determining aberrations of a charged particle beam, and charged particle beam system | Dominik Ehberger | 2025-05-20 |
| 11817292 | Primary charged particle beam current measurement | Christian Droese | 2023-11-14 |
| 11810753 | Methods of determining aberrations of a charged particle beam, and charged particle beam system | Dominik Ehberger, Matthias Firnkes | 2023-11-07 |
| 11791128 | Method of determining the beam convergence of a focused charged particle beam, and charged particle beam system | Dominik Ehberger, Matthias Firnkes | 2023-10-17 |
| 11545338 | Charged particle beam apparatus and method of controlling sample charge | Dominik Ehberger, Alex Goldenshtein | 2023-01-03 |
| 11501947 | Aberration corrector and method of aligning aberration corrector | Matthias Firnkes, Florian Lampersberger, Thomas Kernen, Shem Yehoyda Prazot Ofenburg | 2022-11-15 |
| 11257657 | Charged particle beam device with interferometer for height measurement | Rony Reuveni, Alexander Goldenstein | 2022-02-22 |
| 10991544 | Charged particle beam device, objective lens module, electrode device, and method of inspecting a specimen | Matthias Firnkes, Florian Lampersberger, Hanno Kaupp, Stefan Lanio | 2021-04-27 |
| 10784072 | Aberration-corrected multibeam source, charged particle beam device and method of imaging or illuminating a specimen with an array of primary charged particle beamlets | — | 2020-09-22 |
| 10176965 | Aberration-corrected multibeam source, charged particle beam device and method of imaging or illuminating a specimen with an array of primary charged particle beamlets | — | 2019-01-08 |
| 9697983 | Thermal field emitter tip, electron beam device including a thermal field emitter tip and method for operating an electron beam device | Stefan Lanio, Aleksandra Kramer | 2017-07-04 |
| 9472373 | Beam separator device, charged particle beam device and methods of operating thereof | Stefan Lanio, Jürgen Frosien, Matthias Firnkes, Johannes Hopster | 2016-10-18 |
| 9349566 | Charged particle beam device, beam deflector device and methods of operating thereof | — | 2016-05-24 |