Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12386164 | Method of determining a brightness of a charged particle beam, method of determining a size of a source of the charged particle beam, and charged particle beam imaging device | John Breuer, Dominik Ehberger | 2025-08-12 |
| 11810753 | Methods of determining aberrations of a charged particle beam, and charged particle beam system | Dominik Ehberger, John Breuer | 2023-11-07 |
| 11791128 | Method of determining the beam convergence of a focused charged particle beam, and charged particle beam system | Dominik Ehberger, John Breuer | 2023-10-17 |
| 11501947 | Aberration corrector and method of aligning aberration corrector | Florian Lampersberger, John Breuer, Thomas Kernen, Shem Yehoyda Prazot Ofenburg | 2022-11-15 |
| 11177114 | Electrode arrangement, contact assembly for an electrode arrangement, charged particle beam device, and method of reducing an electrical field strength in an electrode arrangement | Florian Lampersberger, Carlo Salvesen | 2021-11-16 |
| 11094501 | Secondary charged particle imaging system | Florian Lampersberger, Stefan Lanio | 2021-08-17 |
| 10991544 | Charged particle beam device, objective lens module, electrode device, and method of inspecting a specimen | John Breuer, Florian Lampersberger, Hanno Kaupp, Stefan Lanio | 2021-04-27 |
| 10103004 | System and method for imaging a secondary charged particle beam with adaptive secondary charged particle optics | Stefan Lanio, Dieter Winkler | 2018-10-16 |
| 9953805 | System for imaging a secondary charged particle beam with adaptive secondary charged particle optics | Stefan Lanio, Dieter Winkler | 2018-04-24 |
| 9805908 | Signal charged particle deflection device, signal charged particle detection system, charged particle beam device and method of detection of a signal charged particle beam | Stefan Lanio | 2017-10-31 |
| 9666405 | System for imaging a signal charged particle beam, method for imaging a signal charged particle beam, and charged particle beam device | Stefan Lanio, Jürgen Frosien, Benjamin John Cook | 2017-05-30 |
| 9666406 | Charged particle beam device, system for a charged particle beam device, and method for operating a charged particle beam device | Stefan Lanio, Benjamin John Cook | 2017-05-30 |
| 9472373 | Beam separator device, charged particle beam device and methods of operating thereof | Stefan Lanio, John Breuer, Jürgen Frosien, Johannes Hopster | 2016-10-18 |
| 8963083 | Switchable multi perspective detector, optics therefore and method of operating thereof | Stefan Lanio, Gerald Schonecker, Dieter Winkler | 2015-02-24 |