Issued Patents All Time
Showing 1–25 of 41 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11094501 | Secondary charged particle imaging system | Matthias Firnkes, Florian Lampersberger | 2021-08-17 |
| 10991544 | Charged particle beam device, objective lens module, electrode device, and method of inspecting a specimen | Matthias Firnkes, John Breuer, Florian Lampersberger, Hanno Kaupp | 2021-04-27 |
| 10699867 | Simplified particle emitter and method of operating thereof | Jürgen Frosien | 2020-06-30 |
| 10522327 | Method of operating a charged particle beam specimen inspection system | Gilad Erel, Michal Avinun-Kalish | 2019-12-31 |
| 10168614 | On-axis illumination and alignment for charge control during charged particle beam inspection | Alex Goldenshtein | 2019-01-01 |
| 10103004 | System and method for imaging a secondary charged particle beam with adaptive secondary charged particle optics | Matthias Firnkes, Dieter Winkler | 2018-10-16 |
| 10056228 | Charged particle beam specimen inspection system and method for operation thereof | Gilad Erel, Michal Avinun-Kalish | 2018-08-21 |
| 9953805 | System for imaging a secondary charged particle beam with adaptive secondary charged particle optics | Matthias Firnkes, Dieter Winkler | 2018-04-24 |
| 9805908 | Signal charged particle deflection device, signal charged particle detection system, charged particle beam device and method of detection of a signal charged particle beam | Matthias Firnkes | 2017-10-31 |
| 9697983 | Thermal field emitter tip, electron beam device including a thermal field emitter tip and method for operating an electron beam device | Aleksandra Kramer, John Breuer | 2017-07-04 |
| 9666406 | Charged particle beam device, system for a charged particle beam device, and method for operating a charged particle beam device | Matthias Firnkes, Benjamin John Cook | 2017-05-30 |
| 9666405 | System for imaging a signal charged particle beam, method for imaging a signal charged particle beam, and charged particle beam device | Jürgen Frosien, Matthias Firnkes, Benjamin John Cook | 2017-05-30 |
| 9472373 | Beam separator device, charged particle beam device and methods of operating thereof | John Breuer, Jürgen Frosien, Matthias Firnkes, Johannes Hopster | 2016-10-18 |
| 9048068 | Electron beam device with dispersion compensation, and method of operating same | Gerald Schoenecker | 2015-06-02 |
| 8963083 | Switchable multi perspective detector, optics therefore and method of operating thereof | Matthias Firnkes, Gerald Schonecker, Dieter Winkler | 2015-02-24 |
| 8963084 | Contamination reduction electrode for particle detector | — | 2015-02-24 |
| 8816270 | Octopole device and method for spot size improvement | Aleksandra Kramer | 2014-08-26 |
| 8723117 | Switchable multi perspective detector, optics therefor and method of operating thereof | Gerald Schonecker, Dieter Winkler | 2014-05-13 |
| 8563927 | Shielding member having a charge control electrode, and a charged particle beam apparatus | Dieter Winkler | 2013-10-22 |
| 8481958 | Multi-axis lens, beam system making use of the compound lens, and method of manufacturing the compound lens | — | 2013-07-09 |
| 8373136 | Achromatic beam deflector, achromatic beam separator, charged particle device, method of operating an achromatic beam deflector, and method of operating an achromatic beam separator | Gerald Schoenecker | 2013-02-12 |
| 8158954 | Multi-axis lens, beam system making use of the compound lens, and method of manufacturing the compound lens | — | 2012-04-17 |
| 7763866 | Charged particle beam device with aperture | Jürgen Frosien, Helmut Banzhof | 2010-07-27 |
| 7679054 | Double stage charged particle beam energy width reduction system for charged particle beam system | Jürgen Frosien, Ralf Degenhardt | 2010-03-16 |
| 7576917 | Multi-axis lens, beam system making use of the compound lens, and method of manufacturing the compound lens | — | 2009-08-18 |