Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10991544 | Charged particle beam device, objective lens module, electrode device, and method of inspecting a specimen | Matthias Firnkes, John Breuer, Florian Lampersberger, Stefan Lanio | 2021-04-27 |