Issued Patents All Time
Showing 25 most recent of 91 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12412727 | Charged particle beam system, corrector for aberration correction of a charged particle beam, and method thereof | John Breuer | 2025-09-09 |
| RE50540 | Method for inspecting a sample using an assembly comprising a scanning electron microscope and a light microscope | Jacob Pieter Hoogenboom, Nalan Liv Hamarat | 2025-08-19 |
| 12362131 | Method for inspecting a specimen and charged particle beam device | Ron Naftali, Jürgen Frosien, Ralf Schmid, Benjamin John Cook, Roman Barday +1 more | 2025-07-15 |
| 12224152 | Multi-beam charged particle source with alignment means | — | 2025-02-11 |
| 12062519 | Beam deflection device, aberration corrector, monochromator, and charged particle beam device | Hideto Dohi | 2024-08-13 |
| 11961709 | Charged particle beam device for inspection of a specimen with a plurality of charged particle beamlets | Ali Mohammadi-Gheidari, Erik René Kieft | 2024-04-16 |
| RE49602 | Lithography system, sensor and measuring method | Erwin Slot, Tijs Frans Teepen, Marco Jan-Jaco Wieland, Stijn Willem Herman Karel Steenbrink | 2023-08-08 |
| RE49488 | Lithography system, method of clamping and wafer table | Guido De Boer, Michel Pieter Dansberg | 2023-04-11 |
| 10903042 | Apparatus and method for inspecting a sample using a plurality of charged particle beams | Aernout Christiaan Zonnevylle, Yan Ren | 2021-01-26 |
| RE48046 | Lithography system, sensor and measuring method | Erwin Slot, Tijs Frans Teepen, Marco Jan-Jaco Wieland, Stijn Willem Herman Karel Steenbrink | 2020-06-09 |
| 10679819 | Aberration correcting device for an electron microscope and an electron microscope comprising such a device | — | 2020-06-09 |
| 10651009 | Method for inspecting a sample using an assembly comprising a scanning electron microscope and a light microscope | Jacob Pieter Hoogenboom, Nalan Liv Hamarat | 2020-05-12 |
| 10504687 | Signal separator for a multi-beam charged particle inspection apparatus | Ron Naftali | 2019-12-10 |
| 10453645 | Method for inspecting a specimen and charged particle multi-beam device | Jürgen Frosien | 2019-10-22 |
| 10453649 | Apparatus and method for inspecting a sample using a plurality of charged particle beams | Aernout Christiaan Zonnevylle, Yan Ren | 2019-10-22 |
| 10395887 | Apparatus and method for inspecting a surface of a sample, using a multi-beam charged particle column | Ron Naftali | 2019-08-27 |
| 10312052 | Multi electron beam inspection apparatus | — | 2019-06-04 |
| 10132753 | Method and apparatus for determining a density of fluorescent markers in a sample | Jacob Pieter Hoogenboom | 2018-11-20 |
| 9922796 | Method for inspecting a specimen and charged particle multi-beam device | Jürgen Frosien | 2018-03-20 |
| 9715992 | Integrated optical and charged particle inspection apparatus | Jacob Pieter Hoogenboom, Nalan Liv, Aernout Christiaan Zonnevylle | 2017-07-25 |
| 9697985 | Apparatus and method for inspecting a surface of a sample | Ali Mohammadi-Gheidari, Yan Ren | 2017-07-04 |
| 9665013 | Lithography system, method of clamping and wafer table | Guido De Boer, Michel Pieter Dansberg | 2017-05-30 |
| 9645511 | Lithography system, method of clamping and wafer table | Guido De Boer, Michel Pieter Dansberg | 2017-05-09 |
| 9607806 | Charged particle multi-beam apparatus including a manipulator device for manipulation of one or more charged particle beams | Aernout Christiaan Zonnevylle | 2017-03-28 |
| 9484187 | Arrangement for transporting radicals | Marc Smits | 2016-11-01 |