Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE49488 | Lithography system, method of clamping and wafer table | Guido De Boer, Pieter Kruit | 2023-04-11 |
| 10144134 | Enclosure for a target processing machine | Joep Gerard Vijverberg, Laurens Plandsoen, Bas van Gelder, Guido De Boer | 2018-12-04 |
| 10087019 | Load lock system and method for transferring substrates in a lithography system | Sjoerd Hesdahl, Jan Pieter Roelof Jongeneel | 2018-10-02 |
| 9665013 | Lithography system, method of clamping and wafer table | Guido De Boer, Pieter Kruit | 2017-05-30 |
| 9645511 | Lithography system, method of clamping and wafer table | Guido De Boer, Pieter Kruit | 2017-05-09 |
| 9268216 | Projection system with flexible coupling | Jerry Johannes Martinus Peijster | 2016-02-23 |
| 9009631 | Lithography system and method for storing positional data of a target | Alexius Otto Looije, Marcel Nicolaas Jacobus van Kervinck, Guido De Boer | 2015-04-14 |
| 8705010 | Lithography system, method of clamping and wafer table | Guido De Boer, Pieter Kruit | 2014-04-22 |
| 8325321 | Lithography system, method of heat dissipation and frame | Pieter Kruit, Marco Jan-Jaco Wieland | 2012-12-04 |
| 7679720 | Apparatus configured to position a workpiece | Sebastiaan Maria Johannes Cornelissen, Henrikus Herman Marie Cox, Robert Johannes Petrus Van Diesen, Nicolaas Rudolf Kemper, Robert-Han Munnig-Schmidt +2 more | 2010-03-16 |
| 7359032 | Lithographic apparatus and device manufacturing method | Sebastiaan Maria Johannes Cornelissen, Henrikus Herman Marie Cox, Robert Johannes Petrus Van Diesen, Nicolaas Rudolf Kemper, Robert-Han Munnig Schmidt +2 more | 2008-04-15 |