Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11237489 | Adjustment assembly and substrate exposure system comprising such an adjustment assembly | — | 2022-02-01 |
| 11181833 | Substrate processing apparatus | Diederik Geert Femme Verbeek | 2021-11-23 |
| 10324385 | Substrate processing apparatus | Diederik Geert Femme Verbeek | 2019-06-18 |
| 10048599 | Adjustment assembly and substrate exposure system comprising such an adjustment assembly | — | 2018-08-14 |
| 9939728 | Vacuum chamber with a thick aluminum base plate | — | 2018-04-10 |
| 9829804 | Substrate holding device, method for manufacturing such a device, and use of such a device in a lithography system | Paul IJmert Scheffers | 2017-11-28 |
| 9703213 | Substrate processing apparatus | Diederik Geert Femme Verbeek | 2017-07-11 |
| 9268216 | Projection system with flexible coupling | Michel Pieter Dansberg | 2016-02-23 |
| 9199829 | Assembly and a method for lifting a module of a lithography system in a vertical direction and a lithography system comprising such assembly | — | 2015-12-01 |
| 9163664 | Guidance for target processing tool | — | 2015-10-20 |
| 9146480 | Support structure for wafer table | Pieter Kappelhof, Dennis Kemperman | 2015-09-29 |
| 9082584 | Charged particle beam lithography system and target positioning device | Guido De Boer | 2015-07-14 |
| 9030649 | Target positioning device, method for driving a target positioning device, and a lithography system comprising such a target positioning device | — | 2015-05-12 |
| 8957395 | Charged particle beam lithography system and target positioning device | Guido De Boer | 2015-02-17 |
| 8952342 | Support and positioning structure, semiconductor equipment system and method for positioning | Aditya Mehendale, Andre Johannes Maria Hilderink | 2015-02-10 |
| 8905369 | Vibration isolation module and substrate processing system | Rogier Martin Lambert Ellenbroek, Guido De Boer | 2014-12-09 |
| 8796644 | Charged particle beam lithography system and target positioning device | Guido De Boer | 2014-08-05 |
| 8779392 | Charged particle beam lithography system and target positioning device | Guido De Boer | 2014-07-15 |