Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9362084 | Electro-optical element for multiple beam alignment | Alrik van den Brom, Stijn Willem Herman Karel Steenbrink, Marco Jan-Jaco Wieland, Guido De Boer | 2016-06-07 |
| 9146480 | Support structure for wafer table | Jerry Johannes Martinus Peijster, Dennis Kemperman | 2015-09-29 |
| 8710461 | Assembly for providing an aligned stack of two or more modules and a lithography system or a microscopy system comprising such an assembly | — | 2014-04-29 |