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Chuck, a chuck control system, a lithography apparatus and a method of using a chuck |
Noud Jan Gilissen, Anko Jozef Cornelus Sijben, Roger W. Schmitz, Arnoud Willem Notenboom, Ronald Van Der Wilk +1 more |
2016-11-15 |
| 8481978 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Hernes Jacobs +7 more |
2013-07-09 |
| 8138486 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Hernes Jacobs +7 more |
2012-03-20 |
| 7928407 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Hernes Jacobs +7 more |
2011-04-19 |
| 7755742 |
Lithographic apparatus with mounted sensor |
Martinus Agnes Willem Cuijpers, Cornelis Christiaan Ottens, Peter Smits, Johannes Antonius Maria Van De Wal |
2010-07-13 |
| 7679720 |
Apparatus configured to position a workpiece |
Michel Pieter Dansberg, Henrikus Herman Marie Cox, Robert Johannes Petrus Van Diesen, Nicolaas Rudolf Kemper, Robert-Han Munnig-Schmidt +2 more |
2010-03-16 |
| 7633073 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Hernes Jacobs +7 more |
2009-12-15 |
| 7359032 |
Lithographic apparatus and device manufacturing method |
Michel Pieter Dansberg, Henrikus Herman Marie Cox, Robert Johannes Petrus Van Diesen, Nicolaas Rudolf Kemper, Robert-Han Munnig Schmidt +2 more |
2008-04-15 |
| 7184128 |
Lithographic apparatus and device manufacturing method |
Henricus Gerardus Tegenbosch |
2007-02-27 |
| 7072025 |
Lithographic apparatus and device manufacturing method |
Henrikus Herman Marie Cox, Robertus Nicodemus Jacobus Van Ballegoij, Petrus Matthijs Henricus Vosters, Sven Antoin Johan Hol |
2006-07-04 |
| 6906786 |
Lithographic apparatus and device manufacturing method |
Henrikus Herman Marie Cox, Robertus Nicodemus Jacobus Van Ballegoij, Petrus Matthijs Henricus Vosters, Sven Antoin Johan Hol |
2005-06-14 |