Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9971254 | Sensor, lithographic apparatus and device manufacturing method | Thibault Simon Mathieu Laurent, Johannes Henricus Wilhelmus Jacobs, Haico Victor Kok, Yuri Johannes Gabriël Van De Vijver, Bastiaan Andreas Wilhelmus Hubertus Knarren +6 more | 2018-05-15 |
| 9753382 | Sensor, lithographic apparatus and device manufacturing method | Thibault Simon Mathieu Laurent, Johannes Henricus Wilhelmus Jacobs, Haico Victor Kok, Yuri Johannes Gabriël Van De Vijver, Bastiaan Andreas Wilhelmus Hubertus Knarren +6 more | 2017-09-05 |
| 7755742 | Lithographic apparatus with mounted sensor | Sebastiaan Maria Johannes Cornelissen, Martinus Agnes Willem Cuijpers, Cornelis Christiaan Ottens, Peter Smits | 2010-07-13 |