Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7755742 | Lithographic apparatus with mounted sensor | Sebastiaan Maria Johannes Cornelissen, Martinus Agnes Willem Cuijpers, Peter Smits, Johannes Antonius Maria Van De Wal | 2010-07-13 |
| 7307688 | Clamping device for optical elements, lithographic apparatus with optical elements in a clamping device, and method for manufacturing such apparatus | Erik Maria Rekkers | 2007-12-11 |
| 7280228 | System and method of measurement, system and method of alignment, lithographic apparatus and method | Gerrit Johannes Nijmeijer, Anastasius Jacobus Anicetus Bruinsma, Christiaan Alexander Hoogendam, Jeroen Thomas Broekhuijse, Sigurd Dressler +3 more | 2007-10-09 |