Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8547551 | Lithographic apparatus and contamination detection method | Johannes Hubertus Josephina Moors, Lucas Henricus Johannes Stevens, Abraham Veefkind, Peter Gerhardus Wilhelmus Bussink, Egbert Anne Martijn Brouwer | 2013-10-01 |
| 8514368 | Lithographic apparatus, method for levelling an object, and lithographic projection method | Peter Gerhardus Wilhelmus Bussink, Hendricus Johannes Maria Meijer | 2013-08-20 |
| 7781237 | Alignment marker and lithographic apparatus and device manufacturing method using the same | Gert-Jan Heerens, Jacob Klinkhamer, Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Hubert Adriaan Van Mierlo, Willem Vliegenthart | 2010-08-24 |
| 7480028 | Lithographic apparatus for imaging a front side or a back side of a substrate, method of substrate identification, device manufacturing method, substrate, and computer program | Michael Van Der Veen, Henricus Wilhelmus Maria Van Buel, Jacob Klinkhamer, Martinus Hendrikus Antonius Leenders, Christianus Gerardus Maria De Mol +1 more | 2009-01-20 |
| 7391676 | Ultrasonic distance sensors | Willem Jurrianus Venema | 2008-06-24 |
| 7342644 | Methods and systems for lithographic beam generation | Johannes Jacobus Matheus Baselmans, Pieter Willem Herman De Jager, Robert-Han Munnig Schmidt, Henri Johannes Petrus Vink | 2008-03-11 |
| 7280228 | System and method of measurement, system and method of alignment, lithographic apparatus and method | Gerrit Johannes Nijmeijer, Christiaan Alexander Hoogendam, Jeroen Thomas Broekhuijse, Sigurd Dressler, Edwin Eduard Nicolaas Josephus Krijnen +3 more | 2007-10-09 |
| 7233384 | Lithographic apparatus and device manufacturing method, and device manufactured thereby for calibrating an imaging system with a sensor | Willem Jurrianus Venema, Joeri Lof, Eduardus Johannes Gerardus Boon | 2007-06-19 |
| 7177009 | Position determination method and lithographic apparatus | Jacob F. F. Klinkhamer, Martinus Hendrikus Antonius Leenders, Hubert Adriaan Van Mierlo | 2007-02-13 |
| 7173270 | Detector system for detecting a height of a particle, and lithographic apparatus and device manufacturing method including the same. | Pieter Johannes Marius Van Groos, Jan Frederick Hoogkamp, Kees Moddemeijer, Folkert Draaisma | 2007-02-06 |
| 7148494 | Level sensor, lithographic apparatus and device manufacturing method | Frank Staals, Robert Jan Van Wijk, Stoyan Nihtianov | 2006-12-12 |
| 7116401 | Lithographic projection apparatus using catoptrics in an optical sensor system, optical arrangement, method of measuring, and device manufacturing method | Gerrit Johannes Nijmeijer, Christiaan Alexander Hoogendam, Roeland Nicolaas Maria Vanneer | 2006-10-03 |
| 7079225 | Lithographic apparatus and device manufacturing method | Johannes Jacobus Matheus Baselmans, Pieter Willem Herman De Jager, Henri Johannes Petrus Vink | 2006-07-18 |
| 6955074 | Lithographic apparatus, method of calibration, calibration plate, device manufacturing method, and device manufactured thereby | Leon Martin Levasier, Jacob Klinkhamer, Gerrit Johannes Nijmeijer, Petra Albertina Margaretha Dekkers-Rog | 2005-10-18 |
| 5462244 | System for detecting trains | Marinus Jacobus Van Der Hoek, Adolf H. K. Moor, Jaap Roos, Jacobus C. Buisman | 1995-10-31 |