Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7173270 | Detector system for detecting a height of a particle, and lithographic apparatus and device manufacturing method including the same. | Anastasius Jacobus Anicetus Bruinsma, Pieter Johannes Marius Van Groos, Kees Moddemeijer, Folkert Draaisma | 2007-02-06 |
| 6498350 | Crash prevention in positioning apparatus for use in lithographic projection apparatus | Yim-Bun Patrick Kwan, Engelbertus A. F. van de Pasch, Andreas Ariens, Edwin Johan Buis, Robert-Han Munnig Schmidt | 2002-12-24 |