Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7397940 | Object positioning method for a lithographic projection apparatus | Marcus J. H. Willems van Dijk, Engelbertus A. F. van de Pasch, Thomas Josephus Maria Castenmiller | 2008-07-08 |
| 6894261 | Position measuring system for use in lithographic apparatus | Thomas Josephus Maria Castenmiller, Martinus Hendricus Hoeks, Patrick David Vogelsang, Erik Roelof Loopstra, YimBun P. Kwan | 2005-05-17 |
| 6875992 | Position measuring device, position measuring system, lithographic apparatus, and device manufacturing method | Thomas Josephus Maria Castenmiller, Martinus Hendricus Hoeks, Patrick David Vogelsang, Erik Roelof Loopstra, YimBun P. Kwan | 2005-04-05 |
| 6498350 | Crash prevention in positioning apparatus for use in lithographic projection apparatus | Yim-Bun Patrick Kwan, Engelbertus A. F. van de Pasch, Edwin Johan Buis, Jan Frederick Hoogkamp, Robert-Han Munnig Schmidt | 2002-12-24 |