Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8952328 | Charged particle detector system comprising a conversion electrode | Albertus Aemillius Seyno Sluijterman, Eric Gerardus Theodoor Bosch, Johannes Adrianus Carolus Cooijmans | 2015-02-10 |
| 8384879 | Optical position sensor, a position sensitive detector, a lithographic apparatus and a method for determining an absolute position of a movable object to be used in a relative position measurement system | Martinus Cornelis Reijnen, Tom Van Zutphen | 2013-02-26 |
| 7830495 | Lithographic apparatus and position sensor | Olaf Hubertus Wilhelmus Van Bruggen, Marcel Koenraad Marie Baggen, Johannes Roland Dassel, Remko Wakker, Stoyan Nihtianov +4 more | 2010-11-09 |
| 6894261 | Position measuring system for use in lithographic apparatus | Thomas Josephus Maria Castenmiller, Andreas Ariens, Martinus Hendricus Hoeks, Erik Roelof Loopstra, YimBun P. Kwan | 2005-05-17 |
| 6875992 | Position measuring device, position measuring system, lithographic apparatus, and device manufacturing method | Thomas Josephus Maria Castenmiller, Andreas Ariens, Martinus Hendricus Hoeks, Erik Roelof Loopstra, YimBun P. Kwan | 2005-04-05 |