| 8680721 |
Coil, positioning device, actuator, and lithographic apparatus |
Juraj Makarovic, Rody Koops |
2014-03-25 |
| 8384879 |
Optical position sensor, a position sensitive detector, a lithographic apparatus and a method for determining an absolute position of a movable object to be used in a relative position measurement system |
Patrick David Vogelsang, Martinus Cornelis Reijnen |
2013-02-26 |
| 8368032 |
Radiation source, lithographic apparatus, and device manufacturing method |
Dzmitry Labetski, Erik Roelof Loopstra, Gerardus Hubertus Petrus Maria Swinkels |
2013-02-05 |
| 7999912 |
Lithographic apparatus and sensor calibration method |
Engelbertus Antonius Fransiscus Van Der Pasch, Emiel Jozef Melanie Eussen, Stefan Gertrud Marie Hendriks, Erik Roelof Loopstra, Jacob Willem Vink +2 more |
2011-08-16 |
| 7830495 |
Lithographic apparatus and position sensor |
Olaf Hubertus Wilhelmus Van Bruggen, Marcel Koenraad Marie Baggen, Johannes Roland Dassel, Remko Wakker, Stoyan Nihtianov +4 more |
2010-11-09 |
| 6552485 |
Electron tube comprising a semiconductor cathode |
Frederik C. Gehring, Ron Kroon |
2003-04-22 |
| 6310434 |
Picture display device having an improved bandwidth |
Jacobus Stoffels |
2001-10-30 |
| 6262527 |
Cathode ray tube with a getter coating in the vicinity of a semiconductor cathode |
Frederik C. Gehring |
2001-07-17 |
| 6236154 |
Electron tube with a cesium source |
Ron Kroon, Frederik C. Gehring |
2001-05-22 |
| 6198210 |
Electron tube having a semiconductor cathode with lower and higher bandgap layers |
Ron Kroon, Erwin Hijzen |
2001-03-06 |
| 6064074 |
Semiconductor cathode and electron tube comprising a semiconductor cathode |
Frederik C. Gehring, Mark A. De Samber, Erwin Hijzen, Ron Kroon |
2000-05-16 |
| 5880481 |
Electron tube having a semiconductor cathode with lower and higher bandgap layers |
Ron Kroon, Erwin Hijzen |
1999-03-09 |
| 5864201 |
Electron-optical device having separate elongate electron-emitting regions |
Frederik C. Gehring, Albert Manenschijn |
1999-01-26 |
| 5850087 |
Electron tube comprising a semiconductor cathode |
— |
1998-12-15 |
| 5831380 |
Electron-optical device |
Frederik C. Gehring |
1998-11-03 |
| 5604355 |
Electron tube comprising a semiconductor cathode |
— |
1997-02-18 |
| 5444328 |
Electron tube comprising a semiconductor cathode |
— |
1995-08-22 |
