| 12247883 |
Wavelength tracking system, method to calibrate a wavelength tracking system, lithographic apparatus, method to determine an absolute position of a movable object, and interferometer system |
Suzanne Johanna Antonetta Geertruda Cosijns, Koen Govert Olivier VAN DE MEERAKKER, Ivo Widdershoven |
2025-03-11 |
| 12147167 |
Imprint apparatus with movable stages |
Junichi KANEHARA, Hans Butler, Paul Corné Henri DE WIT |
2024-11-19 |
| 11940739 |
Metrology apparatus |
Nitesh Pandey, Arie Jeffrey Den Boef, Duygu Akbulut, Marinus Johannes Maria Van Dam, Hans Butler +4 more |
2024-03-26 |
| 11914308 |
Lithographic apparatus |
Hans Butler, Paul Corné Henri DE WIT |
2024-02-27 |
| 11719529 |
Interferometer system, method of determining a mode hop of a laser source of an interferometer system, method of determining a position of a movable object, and lithographic apparatus |
Maarten Jozef Jansen, Manoj Kumar MRIDHA |
2023-08-08 |
| 11609503 |
Lithographic apparatus |
Hans Butler, Paul Corné Henri DE WIT |
2023-03-21 |
| 11476077 |
Interferometric stage positioning apparatus |
Marcel Koenraad Marie Baggen, Wouter Onno Pril |
2022-10-18 |
| 11287242 |
Cyclic error measurements and calibration procedures in interferometers |
Maarten Jozef Jansen, Suzanne Johanna Antonetta Geertruda Cosijns |
2022-03-29 |
| 11262661 |
Metrology apparatus |
Nitesh Pandey, Arie Jeffrey Den Boef, Duygu Akbulut, Marinus Johannes Maria Van Dam, Hans Butler +4 more |
2022-03-01 |
| 10976675 |
Lithographic apparatus |
Hans Butler, Paul Corné Henri DE WIT |
2021-04-13 |
| 10908508 |
Position measurement of optical elements in a lithographic apparatus |
Erik Loopstra, Sascha Bleidistel, Suzanne Cosijn |
2021-02-02 |
| 10712667 |
Optical device and associated system |
Sumant Sukdew Ramanujan Oemrawsingh, Arno Jan Bleeker, Alexander Matthijs Struycken, Bert Pieter Van Drieënhuizen |
2020-07-14 |
| 10620553 |
Lithographic apparatus and device manufacturing method |
Jan Steven Christiaan Westerlaken, Gerardus Arnoldus Hendricus Franciscus Janssen, Peter Paul Steijaert, Franciscus Van De Mast |
2020-04-14 |
| 10571815 |
Lithographic apparatus |
Hans Butler, Paul Corné Henri DE WIT |
2020-02-25 |
| 10509325 |
Position measurement of optical elements in a lithographic apparatus |
Erik Loopstra, Sascha Bleidistel, Suzanne Cosijn |
2019-12-17 |
| 10466599 |
Lithographic apparatus |
Hans Butler, Paul Corné Henri DE WIT |
2019-11-05 |
| 10444635 |
Lithographic method and apparatus |
Carolus Johannes Catharina Schoormans, Johannes Jacobus Matheus Baselmans, Johannes A. T. M. Van Den Homberg, Maksym SLADKOV, Andreas Johannes Antonius Brouns +1 more |
2019-10-15 |
| 10345717 |
Lithographic apparatus and method |
Günes NAKIBOGLU, Suzanne Johanna Antonetta Geertruda Cosijns, Anne Willemijn Bertine Quist, Lukasz Sosniak, Frank Johannes Jacobus Van Boxtel |
2019-07-09 |
| 10331045 |
Position measurement system and lithographic apparatus |
Emiel Jozef Melanie Eussen, Robbert Edgar Van Leeuwen |
2019-06-25 |
| 10310392 |
Positioning device, lithographic apparatus and device manufacturing method |
Hans Butler, Johannes Petrus Martinus Bernardus Vermeulen |
2019-06-04 |
| 10289011 |
Position measurement system, interferometer and lithographic apparatus |
Robbert Edgar Van Leeuwen |
2019-05-14 |
| 10216102 |
Lithographic apparatus and device manufacturing method |
Jan Steven Christiaan Westerlaken, Gerardus Arnoldus Hendricus Franciscus Janssen, Peter Paul Steijaert, Franciscus Van De Mast |
2019-02-26 |
| 10209634 |
Lithographic apparatus and device manufacturing method |
Hans Butler, Maurice Willem Jozef Etiënne Wijckmans, Christiaan Alexander Hoogendam, Bernardus Antonius Johannes Luttikhuis |
2019-02-19 |
| 9977348 |
Lithographic apparatus and method |
Günes NAKIBOGLU, Suzanne Johanna Antonetta Geertruda Cosijns, Anne Willemijn Bertine Quist, Lukasz Sosniak, Frank Johannes Jacobus Van Boxtel |
2018-05-22 |
| 9915880 |
Stage apparatus, lithographic apparatus and method of positioning an object table |
Andre Bernardus Jeunink, Robbert Edgar Van Leeuwen, Emiel Jozef Melanie Eussen |
2018-03-13 |