Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12305979 | Interferometer system and lithographic apparatus | — | 2025-05-20 |
| 12306548 | Positioning system, a lithographic apparatus, an absolute position determination method, and a device manufacturing method | — | 2025-05-20 |
| 12270647 | Method for calibration of an optical measurement system and optical measurement system | Ping Liu | 2025-04-08 |
| 12270644 | Compact dual pass interferometer for a plane mirror interferometer | — | 2025-04-08 |
| 11719529 | Interferometer system, method of determining a mode hop of a laser source of an interferometer system, method of determining a position of a movable object, and lithographic apparatus | Manoj Kumar MRIDHA, Engelbertus Antonius Fransiscus Van Der Pasch | 2023-08-08 |
| 11556066 | Stage system and lithographic apparatus | Frank Auer | 2023-01-17 |
| 11525737 | Wavelength tracking system, method to calibrate a wavelength tracking system, lithographic apparatus, method to determine an absolute position of a movable object, and interferometer system | — | 2022-12-13 |
| 11287242 | Cyclic error measurements and calibration procedures in interferometers | Engelbertus Antonius Fransiscus Van Der Pasch, Suzanne Johanna Antonetta Geertruda Cosijns | 2022-03-29 |
| 10883816 | Position measurement system, zeroing method, lithographic apparatus and device manufacturing method | — | 2021-01-05 |
| 8937707 | Lithographic apparatus, device manufacturing method, and method of calibrating a displacement measuring system | Andre Schreuder | 2015-01-20 |
| 8576410 | Method and apparatus for determining a height of a number of spatial positions on a sample | Frans de Nooij | 2013-11-05 |
| 8553231 | Method and apparatus for determining the height of a number of spatial positions on a sample defining a profile of a surface through white light interferometry | Katherine Mary Medicus | 2013-10-08 |
| 8547557 | Apparatus for determining a height map of a surface through both interferometric and non-interferometric measurements | — | 2013-10-01 |
| 8289524 | Interferometer using polarization modulation | — | 2012-10-16 |
| 8179599 | Microscope having an inclined optical axis and three-dimensional information acquisition method | — | 2012-05-15 |
| 7471396 | Dual polarization interferometers for measuring opposite sides of a workpiece | — | 2008-12-30 |
| 7379188 | Phase shift interferometer | — | 2008-05-27 |