| 12247883 |
Wavelength tracking system, method to calibrate a wavelength tracking system, lithographic apparatus, method to determine an absolute position of a movable object, and interferometer system |
Engelbertus Antonius Fransiscus Van Der Pasch, Koen Govert Olivier VAN DE MEERAKKER, Ivo Widdershoven |
2025-03-11 |
| 11287242 |
Cyclic error measurements and calibration procedures in interferometers |
Maarten Jozef Jansen, Engelbertus Antonius Fransiscus Van Der Pasch |
2022-03-29 |
| 10866531 |
Athermalization of an alignment system |
Maarten Van Der Heijden, Frederikus Johannes Maria De Vreede, David Taub, Eric D. Emery, Joseph Franklin |
2020-12-15 |
| 10768025 |
Encoder, position measurement system and lithographic apparatus involving an enclosing device |
Wouter Onno Pril, Jan P. Baartman, Allard Eelco Kooiker, Bryan Tong-Minh |
2020-09-08 |
| 10345717 |
Lithographic apparatus and method |
Günes NAKIBOGLU, Anne Willemijn Bertine Quist, Lukasz Sosniak, Frank Johannes Jacobus Van Boxtel, Engelbertus Antonius Fransiscus Van Der Pasch |
2019-07-09 |
| 9977348 |
Lithographic apparatus and method |
Günes NAKIBOGLU, Anne Willemijn Bertine Quist, Lukasz Sosniak, Frank Johannes Jacobus Van Boxtel, Engelbertus Antonius Fransiscus Van Der Pasch |
2018-05-22 |
| 9470988 |
Substrate positioning system, lithographic apparatus and device manufacturing method |
Engelbertus Antonius Fransiscus Van Der Pasch, Albert Johannes Maria Jansen, Andre Bernardus Jeunink, Johannes Mathias Theodorus Antonius Adriaens, Frank Auer +4 more |
2016-10-18 |
| 8111377 |
Lithographic apparatus with an encoder arranged for defining a zero level |
Andre Schreuder |
2012-02-07 |