Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11762304 | Lithographic apparatus | Güneş Nak{dot over (i)}boğlu, Maarten Holtrust, Martinus Van Duijnhoven, Francis Fahrni, Frank Johannes Jacobus Van Boxtel +2 more | 2023-09-19 |
| 10345717 | Lithographic apparatus and method | Günes NAKIBOGLU, Suzanne Johanna Antonetta Geertruda Cosijns, Lukasz Sosniak, Frank Johannes Jacobus Van Boxtel, Engelbertus Antonius Fransiscus Van Der Pasch | 2019-07-09 |
| 9977348 | Lithographic apparatus and method | Günes NAKIBOGLU, Suzanne Johanna Antonetta Geertruda Cosijns, Lukasz Sosniak, Frank Johannes Jacobus Van Boxtel, Engelbertus Antonius Fransiscus Van Der Pasch | 2018-05-22 |