| 11762304 |
Lithographic apparatus |
Güneş Nak{dot over (i)}boğlu, Maarten Holtrust, Francis Fahrni, Frank Johannes Jacobus Van Boxtel, Anne Willemijn Bertine Quist +2 more |
2023-09-19 |
| 11269262 |
Frame assembly, lithographic apparatus and device manufacturing method |
Hans Butler, Joep Sander De Beer, Cornelius Adrianus Lambertus De Hoon, Jeroen Pieter Starreveld, Maurice Willem Jozef Etiënne Wijckmans |
2022-03-08 |
| 11169450 |
Pneumatic support device and lithographic apparatus with pneumatic support device |
Hans Butler, Joep Sander De Beer, Cornelius Adrianus Lambertus De Hoon, Jeroen Pieter Starreveld, Maurice Willem Jozef Etiënne Wijckmans |
2021-11-09 |
| 10962890 |
Positioning device, lithographic apparatus, method for compensating a balance mass torque and device manufacturing method |
Wilhelmus Franciscus Johannes Simons, Dave Braaksma, Hans Butler, Hendrikus Herman Marie Cox, René Wilhelmus Antonius Hubertus LEENAARS +2 more |
2021-03-30 |
| 10114299 |
Lithographic apparatus |
Günes NAKIBOGLU, Mark Constant Johannes Baggen, Gerard Johannes Boogaard, Nicolaas Rudolf Kemper, Sander Kerssemakers +6 more |
2018-10-30 |
| 9977349 |
Support device, lithographic apparatus and device manufacturing method |
Hans Butler, Cornelius Adrianus Lambertus De Hoon, Ingmar August Kerp, Pieter Johannes Gertrudis Meijers, Jeroen Pieter Starreveld +4 more |
2018-05-22 |
| 8743344 |
Cable connection, control system, and method to decrease the passing on of vibrations from a first object to a second object |
Hans Butler, Johan Geerke, Joost De Pee, Cornelius Adrianus Lambertus De Hoon |
2014-06-03 |
| 8493553 |
Lithographic apparatus having a feed forward pressure pulse compensation for the metrology frame |
Hans Butler, Marc Wilhelmus Maria Van Der Wijst |
2013-07-23 |
| 7538273 |
Cable connection to decrease the passing on of vibrations from a first object to a second object |
Hans Butler, Johan Geerke, Joost De Pee, Cornelius Adrianus Lambertus De Hoon |
2009-05-26 |
| 7170582 |
Support device and lightographic apparatus |
Hans Butler, Frank Auer, Pieter Johannes Gertrudis Meijers, Jan-Gerard Cornelis Van Der Toorn, Joost De Pee |
2007-01-30 |
| 7030958 |
Optical attenuator device, radiation system and lithographic apparatus therewith and device manufacturing method |
Cornelis Petrus Luijkx, Vadim Yevgenyevich Banine, Hako Botma, Markus Franciscus Antonius Eurlings, Heine Melle Mulder +3 more |
2006-04-18 |