Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9977349 | Support device, lithographic apparatus and device manufacturing method | Hans Butler, Cornelius Adrianus Lambertus De Hoon, Ingmar August Kerp, Jeroen Pieter Starreveld, Derk Ten Hoopen +4 more | 2018-05-22 |
| 8717532 | Active mount, lithographic apparatus comprising such active mount and method for tuning such active mount | Hans Butler, Hendrikus Johannes Schellens | 2014-05-06 |
| 7170582 | Support device and lightographic apparatus | Hans Butler, Frank Auer, Martinus Van Duijnhoven, Jan-Gerard Cornelis Van Der Toorn, Joost De Pee | 2007-01-30 |
| 7030967 | Lithographic apparatus, device manufacturing method and substrate holder | Robertus Nicodemus Jacobus Van Ballegoij, Martinus Agnes Willem Cuijpers, Gerardus Petrus Matthijs Van Nunen, Joost Jeroen Ottens | 2006-04-18 |