Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12287570 | Pressure control valve, a fluid handling structure for lithographic apparatus and a lithographic apparatus | Stef Marten Johan Janssens, Koen Cuypers, Rogier Hendrikus Magdalena Cortie, Sudhir Srivastava, Theodorus Johannes Antonius Renckens +4 more | 2025-04-29 |
| 11199771 | Pressure control valve, a fluid handling structure for lithographic apparatus and a lithographic apparatus | Stef Marten Johan Janssens, Koen Cuypers, Rogier Hendrikus Magdalena Cortie, Sudhir Srivastava, Theodorus Johannes Antonius Renckens +4 more | 2021-12-14 |
| 10061213 | Sensor, object positioning system, lithographic apparatus and device manufacturing method | Johannes Antonius Gerardus Akkermans, Ruud Antonius Catharina Maria Beerens, Sander Christiaan Broers, Jeroen Johannes Theodorus Hendrikus De Best, Adrianus Marinus Wouter Heeren +6 more | 2018-08-28 |
| 8717532 | Active mount, lithographic apparatus comprising such active mount and method for tuning such active mount | Hans Butler, Pieter Johannes Gertrudis Meijers | 2014-05-06 |