Issued Patents All Time
Showing 1–25 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12287570 | Pressure control valve, a fluid handling structure for lithographic apparatus and a lithographic apparatus | Stef Marten Johan Janssens, Koen Cuypers, Sudhir Srivastava, Theodorus Johannes Antonius Renckens, Jeroen Gerard Gosen +4 more | 2025-04-29 |
| 11860546 | Fluid handling structure for lithographic apparatus | Pepijn Van Den Eijnden, Cornelius Maria Rops, Theodorus Wilhelmus Polet, Floor Lodewijk Keukens, Gheorghe Tanasa +8 more | 2024-01-02 |
| 11454892 | Fluid handling structure for lithographic apparatus | Pepijn Van Den Eijnden, Cornelius Maria Rops, Theodorus Wilhelmus Polet, Floor Lodewijk Keukens, Gheorghe Tanasa +8 more | 2022-09-27 |
| RE49142 | Lithographic apparatus and an object positioning system | Adrianus Hendrik Koevoets, Christianus Wilhelmus Johannes Berendsen, Jim Vincent Overkamp, Patricius Jacobus Neefs, Putra SAPUTRA +4 more | 2022-07-19 |
| 11199771 | Pressure control valve, a fluid handling structure for lithographic apparatus and a lithographic apparatus | Stef Marten Johan Janssens, Koen Cuypers, Sudhir Srivastava, Theodorus Johannes Antonius Renckens, Jeroen Gerard Gosen +4 more | 2021-12-14 |
| 11029607 | Fluid handling structure for lithographic apparatus | Pepijn Van Den Eijnden, Cornelius Maria Rops, Theodorus Wilhelmus Polet, Floor Lodewijk Keukens, Gheorghe Tanasa +8 more | 2021-06-08 |
| 10620544 | Fluid handling structure, lithographic apparatus and device manufacturing method | Paulus Martinus Maria Liebregts, Michel Riepen, Fabrizio Evangelista | 2020-04-14 |
| 10481502 | Object holder and lithographic apparatus | Thibault Simon Mathieu Laurent, Johannes Henricus Wilhelmus Jacobs, Wilhelmus Franciscus Johannes Simons, Martijn Houben, Raymond Wilhelmus Louis Lafarre +8 more | 2019-11-19 |
| 10209624 | Fluid handling structure, lithographic apparatus and device manufacturing method | Paulus Martinus Maria Liebregts, Michel Riepen, Fabrizio Evangelista | 2019-02-19 |
| 10133190 | Fluid handling structure, a lithographic apparatus and a device manufacturing method | Michel Riepen, Cornelius Maria Rops | 2018-11-20 |
| 10018926 | Lithographic apparatus and method of manufacturing a lithographic apparatus | Christianus Wilhelmus Johannes Berendsen, Andre Bernardus Jeunink, Adrianus Hendrik Koevoets, Jim Vincent Overkamp, Siegfried Alexander Tromp +2 more | 2018-07-10 |
| 9971255 | Fluid handling structure, a lithographic apparatus and a device manufacturing method | Nicolaas Ten Kate, Niek Jacobus Johannes Roset, Michel Riepen, Henricus Jozef Castelijns, Cornelius Maria Rops +1 more | 2018-05-15 |
| 9939738 | Lithographic apparatus and an object positioning system | Adrianus Hendrik Koevoets, Christianus Wilhelmus Johannes Berendsen, Jim Vincent Overkamp, Patricius Jacobus Neefs, Putra SAPUTRA +4 more | 2018-04-10 |
| 9915877 | Object holder and lithographic apparatus | Thibault Simon Mathieu Laurent, Johannes Henricus Wilhelmus Jacobs, Wilhelmus Franciscus Johannes Simons, Martijn Houben, Raymond Wilhelmus Louis Lafarre +8 more | 2018-03-13 |
| 9846372 | Fluid handling structure, lithographic apparatus and device manufacturing method | Paulus Martinus Maria Liebregts, Michel Riepen, Fabrizio Evangelista | 2017-12-19 |
| 9785055 | Object holder and lithographic apparatus | Thibault Simon Mathieu Laurent, Johannes Henricus Wilhelmus Jacobs, Wilhelmus Franciscus Johannes Simons, Martijn Houben, Raymond Wilhelmus Louis Lafarre +8 more | 2017-10-10 |
| 9625828 | Fluid handling structure, lithographic apparatus and device manufacturing method | Michel Riepen, Erik Henricus Egidius Catharina Eummelen, Sandra Van Der Graaf, Takeshi Kaneko, Nina Vladimirovna Dziomkina +6 more | 2017-04-18 |
| 9588437 | Fluid handling structure, a lithographic apparatus and a device manufacturing method | Nicolaas Ten Kate, Niek Jacobus Johannes Roset, Michel Riepen, Henricus Jozef Castelijns, Cornelius Maria Rops +1 more | 2017-03-07 |
| 9563132 | Fluid handling structure, a lithographic apparatus and a device manufacturing method | David Bessems, Erik Henricus Egidius Catharina Eummelen, Michel Riepen, Adrianes Johannes Baeten, Cornelius Maria Rops | 2017-02-07 |
| 9442390 | Fluid handling structure including gas supply and gas recovery openings, a lithographic apparatus and a device manufacturing method | Michel Riepen, Cornelius Maria Rops | 2016-09-13 |
| 9291914 | Fluid handling structure, a lithographic apparatus and a device manufacturing method | David Bessems, Marcus Johannes Van Der Zanden, Cornelius Maria Rops, Paul A. Willems, Jimmy Matheus Wilhelmus Van De Winkel +1 more | 2016-03-22 |
| 9256136 | Fluid handling structure, lithographic apparatus and device manufacturing method involving gas supply | Paulus Martinus Maria Liebregts, Michel Riepen, Fabrizio Evangelista | 2016-02-09 |
| 9235138 | Fluid handling structure, a lithographic apparatus and a device manufacturing method | Nicolaas Ten Kate, Niek Jacobus Johannes Roset, Michel Riepen, Henricus Jozef Castelijns, Cornelius Maria Rops +1 more | 2016-01-12 |
| 9069262 | Fluid handling structure including gas supply and gas recovery openings, lithographic apparatus and device manufacturing method | Michel Riepen, Cornelius Maria Rops | 2015-06-30 |
| 8953141 | Immersion lithographic apparatus and device manufacturing method with asymmetric acceleration profile of substrate table to maintain meniscus of immersion liquid | Martinus Hendrikus Antonius Leenders, Sjoerd Nicolaas Lambertus Donders, Christian Wagner | 2015-02-10 |