| 11650511 |
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Thibault Simon Mathieu Laurent, Hendrikus Johannes Marinus Van Abeelen, Armand Rosa Jozef Dassen, Sander Catharina Reinier Derks |
2023-05-16 |
| 11385547 |
Extraction body for lithographic apparatus |
Gijs Kramer, Nicholas Peter Waterson, Thibault Simon Mathieu Laurent, Yuri Johannes Gabriël Van De Vijver, Marcus Martinus Petrus Adrianus Vermeulen +6 more |
2022-07-12 |
| 11300890 |
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Johannes Henricus Wilhelmus Jacobs, Coen Cornelis Wilhelmus Verspaget, Ronald Van Der Ham, Ivo Adam Johannes Thomas +7 more |
2022-04-12 |
| 10747126 |
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Thibault Simon Mathieu Laurent, Hendrikus Johannes Marinus Van Abeelen, Armand Rosa Jozef Dassen, Sander Catharina Reinier Derks |
2020-08-18 |
| 10747125 |
Support apparatus, lithographic apparatus and device manufacturing method |
Raymond Wilhelmus Louis Lafarre, Adrianus Hendrik Koevoets, Sjoerd Nicolaas Lambertus Donders, Menno Fien, Antonius Franciscus Johannes De Groot +6 more |
2020-08-18 |
| 10705426 |
Extraction body for lithographic apparatus |
Gijs Kramer, Nicholas Peter Waterson, Thibault Simon Mathieu Laurent, Yuri Johannes Gabriël Van De Vijver, Marcus Martinus Petrus Adrianus Vermeulen +6 more |
2020-07-07 |
| 10656536 |
Substrate support, method for loading a substrate on a substrate support location, lithographic apparatus and device manufacturing method |
Martinus Hendrikus Antonius Leenders, Niek Elout De Kruijf, Mircea Dusa, Johannes Gerardus Maria Mulder, Thomas POIESZ +5 more |
2020-05-19 |
| 10520837 |
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Johannes Henricus Wilhelmus Jacobs, Coen Cornelis Wilhelmus Verspaget, Ronald Van Der Ham, Ivo Adam Johannes Thomas +7 more |
2019-12-31 |
| 10481502 |
Object holder and lithographic apparatus |
Thibault Simon Mathieu Laurent, Johannes Henricus Wilhelmus Jacobs, Wilhelmus Franciscus Johannes Simons, Raymond Wilhelmus Louis Lafarre, Koen Steffens +8 more |
2019-11-19 |
| 10453734 |
Substrate holder, a lithographic apparatus and method of manufacturing devices |
Thomas POIESZ, Abraham Alexander Soethoudt |
2019-10-22 |
| 10324382 |
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Thibault Simon Mathieu Laurent, Hendrikus Johannes Marinus Van Abeelen, Armand Rosa Jozef Dassen, Sander Catharina Reinier Derks |
2019-06-18 |
| 10120292 |
Support apparatus, lithographic apparatus and device manufacturing method |
Raymond Wilhelmus Louis Lafarre, Adrianus Hendrik Koevoets, Sjoerd Nicolaas Lambertus Donders, Menno Fien, Antonius Franciscus Johannes De Groot +6 more |
2018-11-06 |
| 9971252 |
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Thibault Simon Mathieu Laurent, Hendrikus Johannes Marinus Van Abeelen, Armand Rosa Jozef Dassen, Sander Catharina Reinier Derks |
2018-05-15 |
| 9946172 |
System for positioning an object in lithography |
Peter Paul HEMPENIUS, Nicolaas Rudolf Kemper, Robertus Mathijs Gerardus Rijs, Paul Corné Henri DE WIT, Stijn Willem Boere +2 more |
2018-04-17 |
| 9939736 |
Substrate holder and support table for lithography |
Thomas POIESZ |
2018-04-10 |
| 9915877 |
Object holder and lithographic apparatus |
Thibault Simon Mathieu Laurent, Johannes Henricus Wilhelmus Jacobs, Wilhelmus Franciscus Johannes Simons, Raymond Wilhelmus Louis Lafarre, Koen Steffens +8 more |
2018-03-13 |
| 9897928 |
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Johannes Henricus Wilhelmus Jacobs, Coen Cornelis Wilhelmus Verspaget, Ronald Van Der Ham, Ivo Adam Johannes Thomas +7 more |
2018-02-20 |
| 9835957 |
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method |
Alwin De Kock, Hendrikus Johannes Marinus Van Abeelen, Marco Adrianus Peter Van Den Heuvel |
2017-12-05 |
| 9785055 |
Object holder and lithographic apparatus |
Thibault Simon Mathieu Laurent, Johannes Henricus Wilhelmus Jacobs, Wilhelmus Franciscus Johannes Simons, Raymond Wilhelmus Louis Lafarre, Koen Steffens +8 more |
2017-10-10 |
| 9740110 |
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Thibault Simon Mathieu Laurent, Hendrikus Johannes Marinus Van Abeelen, Armand Rosa Jozef Dassen, Sander Catharina Reinier Derks |
2017-08-22 |
| 9575419 |
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Thibault Simon Mathieu Laurent, Hendrikus Johannes Marinus Van Abeelen, Armand Rosa Jozef Dassen, Sander Catharina Reinier Derks |
2017-02-21 |
| 9507275 |
Support apparatus, lithographic apparatus and device manufacturing method |
Raymond Wilhelmus Louis Lafarre, Adrianus Hendrik Koevoets, Sjoerd Nicolaas Lambertus Donders, Menno Fien, Antonius Franciscus Johannes De Groot +6 more |
2016-11-29 |
| 9280063 |
Substrate table assembly, an immersion lithographic apparatus and a device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Sjoerd Nicolaas Lambertus Donders, Johannes Henricus Wilhelmus Jacobs, Thibault Simon Mathieu Laurent, Frank Johannes Jacobus Van Boxtel +1 more |
2016-03-08 |
| 9019476 |
Lithographic apparatus and device manufacturing method |
Rene Theodorus Petrus Compen, Oleg Viacheslavovich Voznyi, Majid El Bouchaibi, Franciscus Johannes Maria Boekholt, Remko Wakker |
2015-04-28 |
| 8970822 |
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Thibault Simon Mathieu Laurent, Hendrikus Johannes Marinus Van Abeelen, Armand Rosa Jozef Dassen, Sander Catharina Reinier Derks |
2015-03-03 |