| 11650511 |
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Martijn Houben, Thibault Simon Mathieu Laurent, Hendrikus Johannes Marinus Van Abeelen, Sander Catharina Reinier Derks |
2023-05-16 |
| 10747126 |
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Martijn Houben, Thibault Simon Mathieu Laurent, Hendrikus Johannes Marinus Van Abeelen, Sander Catharina Reinier Derks |
2020-08-18 |
| 10324382 |
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Martijn Houben, Thibault Simon Mathieu Laurent, Hendrikus Johannes Marinus Van Abeelen, Sander Catharina Reinier Derks |
2019-06-18 |
| 9971252 |
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Martijn Houben, Thibault Simon Mathieu Laurent, Hendrikus Johannes Marinus Van Abeelen, Sander Catharina Reinier Derks |
2018-05-15 |
| 9740110 |
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Martijn Houben, Thibault Simon Mathieu Laurent, Hendrikus Johannes Marinus Van Abeelen, Sander Catharina Reinier Derks |
2017-08-22 |
| 9575419 |
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Martijn Houben, Thibault Simon Mathieu Laurent, Hendrikus Johannes Marinus Van Abeelen, Sander Catharina Reinier Derks |
2017-02-21 |
| 8970822 |
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Martijn Houben, Thibault Simon Mathieu Laurent, Hendrikus Johannes Marinus Van Abeelen, Sander Catharina Reinier Derks |
2015-03-03 |