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Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Martijn Houben, Thibault Simon Mathieu Laurent, Armand Rosa Jozef Dassen, Sander Catharina Reinier Derks |
2023-05-16 |
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Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Martijn Houben, Thibault Simon Mathieu Laurent, Armand Rosa Jozef Dassen, Sander Catharina Reinier Derks |
2020-08-18 |
| 10324382 |
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Martijn Houben, Thibault Simon Mathieu Laurent, Armand Rosa Jozef Dassen, Sander Catharina Reinier Derks |
2019-06-18 |
| 9971252 |
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Martijn Houben, Thibault Simon Mathieu Laurent, Armand Rosa Jozef Dassen, Sander Catharina Reinier Derks |
2018-05-15 |
| 9835957 |
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method |
Martijn Houben, Alwin De Kock, Marco Adrianus Peter Van Den Heuvel |
2017-12-05 |
| 9740110 |
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Martijn Houben, Thibault Simon Mathieu Laurent, Armand Rosa Jozef Dassen, Sander Catharina Reinier Derks |
2017-08-22 |
| 9575419 |
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Martijn Houben, Thibault Simon Mathieu Laurent, Armand Rosa Jozef Dassen, Sander Catharina Reinier Derks |
2017-02-21 |
| 8970822 |
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Martijn Houben, Thibault Simon Mathieu Laurent, Armand Rosa Jozef Dassen, Sander Catharina Reinier Derks |
2015-03-03 |
| 8564763 |
Lithographic apparatus and method |
Johannes Henricus Wilhelmus Jacobs, Martinus Hendrikus Antonius Leenders, Frits Van Der Meulen, Joost Jeroen Ottens, Anko Jozef Cornelus Sijben +3 more |
2013-10-22 |
| 8269949 |
Lithographic apparatus and device manufacturing method |
Marcus Martinus Petrus Adrianus Vermeulen, Andre Bernardus Jeunink, Erik Roelof Loopstra, Joost Jeroen Ottens, Rene Theodorus Petrus Compen +4 more |
2012-09-18 |