Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10416567 | Illumination system and metrology system | Johannes Matheus Marie De Wit, Kim Gerard Feijen, Martinus Gerardus Johannes Maria MAASSEN, Henricus Martinus Johannes Van De Groes | 2019-09-17 |
| 9494875 | Chuck, a chuck control system, a lithography apparatus and a method of using a chuck | Sebastiaan Maria Johannes Cornelissen, Noud Jan Gilissen, Roger W. Schmitz, Arnoud Willem Notenboom, Ronald Van Der Wilk +1 more | 2016-11-15 |
| 9360771 | Electrostatic clamp, lithographic apparatus, and device manufacturing method | Eugene Maria Brinkhof, Jan Bex, Johannes Wilhelmus Damen | 2016-06-07 |
| 8564763 | Lithographic apparatus and method | Johannes Henricus Wilhelmus Jacobs, Martinus Hendrikus Antonius Leenders, Frits Van Der Meulen, Joost Jeroen Ottens, Wouterus Johannes Petrus Maria Maas +3 more | 2013-10-22 |
| 8098475 | Electrostatic clamp, lithographic apparatus and method of manufacturing an electrostatic clamp | — | 2012-01-17 |
| 7940511 | Electrostatic clamp, lithographic apparatus and method of manufacturing an electrostatic clamp | — | 2011-05-10 |