Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9748682 | Actuation system and lithographic apparatus | Martinus Jacobus Coenen, Hermannus Antonius Langeler | 2017-08-29 |
| 9360771 | Electrostatic clamp, lithographic apparatus, and device manufacturing method | Eugene Maria Brinkhof, Jan Bex, Anko Jozef Cornelus Sijben | 2016-06-07 |
| 9354528 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Jan Bex, Nicolaas Ten Kate, Raymond Wilhelmus Louis Lafarre, Eugene Maria Brinkhof, Yogesh Pramod Karade | 2016-05-31 |
| 9112300 | Electrical connector for lithographic projection apparatus | Jeroen Van Duivenbode, Henricus H. M. van Hout | 2015-08-18 |
| 8947638 | Actuation system and lithographic apparatus | Martinus Jacobus Coenen, Hermannus Antonius Langeler | 2015-02-03 |
| 8130359 | Lithographic apparatus and a vacuum chamber | — | 2012-03-06 |