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Substrate support and substrate table |
Coen Hubertus Matheus Baltis, Marcus Martinus Petrus Adrianus Vermeulen, Siegfried Alexander Tromp, Frank Pieter Albert Van Den Berkmortel, Niek Jacobus Johannes Roset +3 more |
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Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder |
Raymond Wilhelmus Louis Lafarre, Sjoerd Nicolaas Lambertus Donders, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Elisabeth Corinne Rodenburg |
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| 12353139 |
Substrate holder and method of manufacturing a substrate holder |
Raymond Wilhelmus Louis Lafarre, Sjoerd Nicolaas Lambertus Donders, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Elisabeth Corinne Rodenburg |
2025-07-08 |
| 12315756 |
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Michael Marinus Anna STEUR, Siegfried Alexander Tromp, Koen Gerhardus Winkels, Antonius Franciscus Johannes De Groot |
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| 12242204 |
Substrate support, lithographic apparatus, method for manipulating charge distribution and method for preparing a substrate |
Ruud Antonius Catharina Maria Beerens, Koen Gerhardus Winkels, Dirk Willem Harberts, Lucas Henricus Johannes Stevens, Dennis Dominic VAN DER VOORT +2 more |
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| 12242206 |
Method for preparing a substrate and lithographic apparatus |
Dennis Dominic VAN DER VOORT |
2025-03-04 |
| 12204255 |
Lithographic apparatus and method |
Joost Jeroen Ottens, Bastiaan Andreas Wilhelmus Hubertus Knarren, Robbert Jan Voogd, Giovanni Nino, Marinus Jan Remie +3 more |
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| 12072635 |
Lithographic apparatus and a method of operating the apparatus |
Christian Gerardus Norbertus Hendricus Marie Cloin, Nicolaas Rudolf Kemper, Marco Koert Stavenga, Erik Henricus Egidius Catharina Eummelen, Michel Riepen +3 more |
2024-08-27 |
| 12055862 |
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder |
Raymond Wilhelmus Louis Lafarre, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade |
2024-08-06 |
| 12032296 |
Fluid handling system, method and lithographic apparatus |
Yang-Shan Huang |
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| 11960213 |
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder |
Raymond Wilhelmus Louis Lafarre, Sjoerd Nicolaas Lambertus Donders, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Elisabeth Corinne Rodenburg |
2024-04-16 |
| 11860546 |
Fluid handling structure for lithographic apparatus |
Pepijn Van Den Eijnden, Cornelius Maria Rops, Theodorus Wilhelmus Polet, Floor Lodewijk Keukens, Gheorghe Tanasa +8 more |
2024-01-02 |
| 11807937 |
Method and apparatus for forming a patterned layer of carbon, method of forming a patterned layer of material |
Sonia Castellanos Ortega, Jan Verhoeven, Joost Wilhelmus Maria FRENKEN, Pavlo ANTONOV, Olivier Christian Maurice LUGIER |
2023-11-07 |
| 11754929 |
Substrate holder and method of manufacturing a substrate holder |
Raymond Wilhelmus Louis Lafarre, Sjoerd Nicolaas Lambertus Donders, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Elisabeth Corinne Rodenburg |
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| 11720034 |
Lithographic apparatus and cooling method |
Gosse Charles De Vries |
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| 11630399 |
Lithographic apparatus and method |
Joost Jeroen Ottens, Bastiaan Andreas Wilhelmus Hubertus Knarren, Robbert Jan Voogd, Giovanni Nino, Marinus Jan Remie +3 more |
2023-04-18 |
| 11628498 |
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder |
Raymond Wilhelmus Louis Lafarre, Sjoerd Nicolaas Lambertus Donders, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Elisabeth Corinne Rodenburg |
2023-04-18 |
| 11609504 |
Lithographic apparatus and device manufacturing method |
Johannes Catharinus Hubertus Mulkens |
2023-03-21 |
| 11454892 |
Fluid handling structure for lithographic apparatus |
Pepijn Van Den Eijnden, Cornelius Maria Rops, Theodorus Wilhelmus Polet, Floor Lodewijk Keukens, Gheorghe Tanasa +8 more |
2022-09-27 |
| 11454895 |
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder |
Raymond Wilhelmus Louis Lafarre, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade |
2022-09-27 |
| 11378893 |
Lithographic apparatus and device manufacturing method involving a heater |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Van Meer, Jeroen Johannes Sophia Maria Mertens +20 more |
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| 11376663 |
Substrate holder and method of manufacturing a substrate holder |
Raymond Wilhelmus Louis Lafarre, Sjoerd Nicolaas Lambertus Donders, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Elisabeth Corinne Rodenburg |
2022-07-05 |
| 11281115 |
Lithographic apparatus and method |
Joost Jeroen Ottens, Bastiaan Andreas Wilhelmus Hubertus Knarren, Robbert Jan Voogd, Giovanni Nino, Marinus Jan Remie +3 more |
2022-03-22 |
| 11235388 |
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder |
Raymond Wilhelmus Louis Lafarre, Sjoerd Nicolaas Lambertus Donders, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Elisabeth Corinne Rodenburg |
2022-02-01 |
| 11187991 |
Lithographic apparatus and a method of operating the apparatus |
Christian Gerardus Norbertus Hendricus Marie Cloin, Nicolaas Rudolf Kemper, Marco Koert Stavenga, Erik Henricus Egidius Catharina Eummelen, Michel Riepen +3 more |
2021-11-30 |