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Substrate holder for use in a lithographic apparatus |
Thomas POIESZ, Abraham Alexander Soethoudt, Mehmet Ali AKBAS, Dennis Van Den Berg, Wouter VANESCH +1 more |
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Hollow-core photonic crystal fiber based optical component for broadband radiation generation |
Patrick Sebastian Uebel, Peter Maximilian Götz, Sebastian Thomas Bauerschmidt, Janneke Ravensbergen |
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| 11774671 |
Hollow-core photonic crystal fiber based optical component for broadband radiation generation |
Patrick Sebastian Uebel, Peter Maximilian Götz, Sebastian Thomas Bauerschmidt, Janneke Ravensbergen |
2023-10-03 |
| 11664264 |
Lithographic apparatus, method for unloading a substrate and method for loading a substrate |
Andre Bernardus Jeunink, Robby Franciscus Josephus MARTENS, Youssef Karel Maria De Vos, Ringo Petrus Cornelis VAN DORST, Gerhard Albert TEN BRINKE +11 more |
2023-05-30 |
| 11579533 |
Substrate holder, a lithographic apparatus and method of manufacturing devices |
Günes NAKIBOGLU, Siegfried Alexander Tromp, Yuri Johannes Gabriël Van De Vijver, Bert Dirk SCHOLTEN, Daan Daniel Johannes Antonius Van Sommeren +1 more |
2023-02-14 |
| 11448976 |
Substrate holder for use in a lithographic apparatus |
Thomas POIESZ, Abraham Alexander Soethoudt, Mehmet Ali AKBAS, Dennis Van Den Berg, Wouter VANESCH +1 more |
2022-09-20 |
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Extraction body for lithographic apparatus |
Gijs Kramer, Martijn Houben, Nicholas Peter Waterson, Thibault Simon Mathieu Laurent, Yuri Johannes Gabriël Van De Vijver +6 more |
2022-07-12 |
| 11016402 |
Particle removal apparatus and associated system |
Jeroen Van Duivenbode, Petrus Jacobus Maria VAN GILS, Petrus Johannes Van Den Oever |
2021-05-25 |
| 10895808 |
Substrate holder, a lithographic apparatus and method of manufacturing devices |
Günes NAKIBOGLU, Siegfried Alexander Tromp, Yuri Johannes Gabriël Van De Vijver, Bert Dirk SCHOLTEN, Daan Daniel Johannes Antonius Van Sommeren +1 more |
2021-01-19 |
| 10705426 |
Extraction body for lithographic apparatus |
Gijs Kramer, Martijn Houben, Nicholas Peter Waterson, Thibault Simon Mathieu Laurent, Yuri Johannes Gabriël Van De Vijver +6 more |
2020-07-07 |
| 10571810 |
Substrate table, a lithographic apparatus and a method of operating a lithographic apparatus |
Daan Daniel Johannes Antonius Van Sommeren, Harold Sebastiaan Buddenberg, Giovanni Luca Gattobigio, Johannes Cornelius Paulus Melman, Günes NAKIBOGLU +6 more |
2020-02-25 |
| 10317804 |
Substrate table, lithographic apparatus and method of operating a lithographic apparatus |
Daan Daniel Johannes Antonius Van Sommeren, Harold Sebastiaan Buddenberg, Giovanni Luca Gattobigio, Johannes Cornelis Paulus Melman, Günes NAKIBOGLU +6 more |
2019-06-11 |