| 12429778 |
Fluid handling system, method and lithographic apparatus |
Cornelius Maria Rops, Erik Henricus Egidius Catharina Eummelen, Christianus Wilhelmus Johannes Berendsen |
2025-09-30 |
| 12242200 |
Lithography apparatus and a method of manufacturing a device |
Erik Henricus Egidius Catharina Eummelen, Frank Debougnoux, Koen Cuypers, Han Henricus Aldegonda Lempens, Theodorus Wilhelmus Polet +3 more |
2025-03-04 |
| 11860546 |
Fluid handling structure for lithographic apparatus |
Pepijn Van Den Eijnden, Cornelius Maria Rops, Theodorus Wilhelmus Polet, Floor Lodewijk Keukens, Gheorghe Tanasa +8 more |
2024-01-02 |
| 11809086 |
Fluid handling structure, a lithographic apparatus, a method of using a fluid handling structure and a method of using a lithographic apparatus |
Raphael Nico Johan Stegen, Theodorus Wilhelmus Polet |
2023-11-07 |
| 11774857 |
Lithography apparatus and device manufacturing method |
Erik Henricus Egidius Catharina Eummelen, Frank Debougnoux, Koen Cuypers, Han Henricus Aldegonda Lempens, Theodorus Wilhelmus Polet +3 more |
2023-10-03 |
| 11720032 |
Process tool and an inspection method |
Raphael Nico Johan Stegen, Erik Henricus Egidius Catharina Eummelen, Christianus Wilhelmus Johannes Berendsen, Theodorus Wilhelmus Polet |
2023-08-08 |
| 11614689 |
Fluid handling structure and lithographic apparatus |
Erik Henricus Egidius Catharina Eummelen, Johannes Cornelis Paulus Melman, Han Henricus Aldegonda Lempens, Miao Yu, Cornelius Maria Rops +4 more |
2023-03-28 |
| 11454892 |
Fluid handling structure for lithographic apparatus |
Pepijn Van Den Eijnden, Cornelius Maria Rops, Theodorus Wilhelmus Polet, Floor Lodewijk Keukens, Gheorghe Tanasa +8 more |
2022-09-27 |
| 11372336 |
Lithography apparatus and device manufacturing method |
Erik Henricus Egidius Catharina Eummelen, Frank Debougnoux, Koen Cuypers, Han Henricus Aldegonda Lempens, Theodorus Wilhelmus Polet +3 more |
2022-06-28 |
| 11372339 |
Device manufacturing method and computer program |
Pieter Jeroen Johan Emanuel Hoefnagels, Ronald Frank KOX, Marcus Johannes Van Der Zanden, Maarten Marinus Van Oene, Jorge Alberto Vieyra Salas |
2022-06-28 |
| 11231653 |
Fluid handling structure and lithographic apparatus |
Erik Henricus Egidius Catharina Eummelen, Johannes Cornelis Paulus Melman, Han Henricus Aldegonda Lempens, Miao Yu, Cornelius Maria Rops +4 more |
2022-01-25 |
| 11156921 |
Fluid handling structure, lithographic apparatus, and method of using a fluid handling structure |
Raphael Nico Johan Stegen, Theodorus Wilhelmus Polet |
2021-10-26 |
| 11143969 |
Method of performance testing working parameters of a fluid handling structure and a method of detecting loss of immersion liquid from a fluid handing structure in an immersion lithographic apparatus |
Nirupam Banerjee, Johan Franciscus Maria Beckers, Erik Henricus Egidius Catharina Eummelen, Ronald Frank KOX, Theodorus Wilhelmus Polet +4 more |
2021-10-12 |
| 11086239 |
Cleaning device and method of cleaning |
Miao Yu, Petrus Martinus Gerardus Johannes Arts, Erik Henricus Egidius Catharina Eummelen, Maarten Holtrust, Han Henricus Aldegonda Lempens +3 more |
2021-08-10 |
| 11029607 |
Fluid handling structure for lithographic apparatus |
Pepijn Van Den Eijnden, Cornelius Maria Rops, Theodorus Wilhelmus Polet, Floor Lodewijk Keukens, Gheorghe Tanasa +8 more |
2021-06-08 |
| 10969695 |
Fluid handling structure and lithographic apparatus |
Erik Henricus Egidius Catharina Eummelen, Johannes Cornelis Paulus Melman, Han Henricus Aldegonda Lempens, Miao Yu, Cornelius Maria Rops +4 more |
2021-04-06 |
| 10859919 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method |
Cornelius Maria Rops, Walter Theodorus Matheus STALS, David Bessems, Victor Manuel Blanco Carballo, Erik Henricus Egidius Catharina Eummelen +3 more |
2020-12-08 |
| 10725390 |
Inspection substrate and an inspection method |
Seerwan Saeed, Petrus Martinus Gerardus Johannes Arts, Harold Sebastiaan Buddenberg, Erik Henricus Egidius Catharina Eummelen, Floor Lodewijk Keukens +8 more |
2020-07-28 |
| 10571810 |
Substrate table, a lithographic apparatus and a method of operating a lithographic apparatus |
Daan Daniel Johannes Antonius Van Sommeren, Coen Hubertus Matheus Baltis, Harold Sebastiaan Buddenberg, Johannes Cornelius Paulus Melman, Günes NAKIBOGLU +6 more |
2020-02-25 |
| 10551748 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method |
Cornelius Maria Rops, Walter Theodorus Matheus STALS, David Bessems, Victor Manuel Blanco Carballo, Erik Henricus Egidius Catharina Eummelen +3 more |
2020-02-04 |
| 10416571 |
Fluid handling structure and lithographic apparatus |
Erik Henricus Egidius Catharina Eummelen, Johannes Cornelis Paulus Melman, Han Henricus Aldegonda Lempens, Miao Yu, Cornelius Maria Rops +4 more |
2019-09-17 |
| 10317804 |
Substrate table, lithographic apparatus and method of operating a lithographic apparatus |
Daan Daniel Johannes Antonius Van Sommeren, Coen Hubertus Matheus Baltis, Harold Sebastiaan Buddenberg, Johannes Cornelis Paulus Melman, Günes NAKIBOGLU +6 more |
2019-06-11 |
| 10216100 |
Inspection substrate and an inspection method |
Seerwan Saeed, Petrus Martinus Gerardus Johannes Arts, Harold Sebastiaan Buddenberg, Erik Henricus Egidius Catharina Eummelen, Floor Lodewijk Keukens +8 more |
2019-02-26 |
| 10095129 |
Lithographic apparatus and a method of manufacturing a device using a lithographic apparatus |
Erik Henricus Egidius Catharina Eummelen, Ruud Olieslagers, Gerben Pieterse, Cornelius Maria Rops, Laurentius Johannes Adrianus Van Bokhoven |
2018-10-09 |