Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10859919 | Fluid handling structure, a lithographic apparatus and a device manufacturing method | Cornelius Maria Rops, David Bessems, Giovanni Luca Gattobigio, Victor Manuel Blanco Carballo, Erik Henricus Egidius Catharina Eummelen +3 more | 2020-12-08 |
| 10571810 | Substrate table, a lithographic apparatus and a method of operating a lithographic apparatus | Daan Daniel Johannes Antonius Van Sommeren, Coen Hubertus Matheus Baltis, Harold Sebastiaan Buddenberg, Giovanni Luca Gattobigio, Johannes Cornelius Paulus Melman +6 more | 2020-02-25 |
| 10551748 | Fluid handling structure, a lithographic apparatus and a device manufacturing method | Cornelius Maria Rops, David Bessems, Giovanni Luca Gattobigio, Victor Manuel Blanco Carballo, Erik Henricus Egidius Catharina Eummelen +3 more | 2020-02-04 |
| 10317804 | Substrate table, lithographic apparatus and method of operating a lithographic apparatus | Daan Daniel Johannes Antonius Van Sommeren, Coen Hubertus Matheus Baltis, Harold Sebastiaan Buddenberg, Giovanni Luca Gattobigio, Johannes Cornelis Paulus Melman +6 more | 2019-06-11 |
| RE39434 | Method of manufacturing a stamper for producing optical discs, a stamper thus obtained and an optical disc obtained by using such a stamper | Thomas Wilhemus Engelen, Jacobus J. T. T. Vermeijlen | 2006-12-19 |
| 6423477 | Method of manufacturing a stamper for producing optical discs, a stamper thus obtained and an optical disc obtained by using such a stamper | Thomas Wilhelmus Engelen, Jacobus J. T. T. Vermeijlen | 2002-07-23 |