| 11762304 |
Lithographic apparatus |
Güneş Nak{dot over (i)}boğlu, Maarten Holtrust, Martinus Van Duijnhoven, Francis Fahrni, Frank Johannes Jacobus Van Boxtel +2 more |
2023-09-19 |
| 11579533 |
Substrate holder, a lithographic apparatus and method of manufacturing devices |
Günes NAKIBOGLU, Coen Hubertus Matheus Baltis, Siegfried Alexander Tromp, Yuri Johannes Gabriël Van De Vijver, Bert Dirk SCHOLTEN +1 more |
2023-02-14 |
| 10948825 |
Method for removing photosensitive material on a substrate |
Christianus Wilhelmus Johannes Berendsen, Güneş Nakibo{hacek over (g)}lu, Gijsbert Rispens, Johan Franciscus Maria Beckers, Theodorus Johannes Antonius Renckens |
2021-03-16 |
| 10895808 |
Substrate holder, a lithographic apparatus and method of manufacturing devices |
Günes NAKIBOGLU, Coen Hubertus Matheus Baltis, Siegfried Alexander Tromp, Yuri Johannes Gabriël Van De Vijver, Bert Dirk SCHOLTEN +1 more |
2021-01-19 |
| 10725390 |
Inspection substrate and an inspection method |
Seerwan Saeed, Petrus Martinus Gerardus Johannes Arts, Harold Sebastiaan Buddenberg, Erik Henricus Egidius Catharina Eummelen, Giovanni Luca Gattobigio +8 more |
2020-07-28 |
| 10571810 |
Substrate table, a lithographic apparatus and a method of operating a lithographic apparatus |
Coen Hubertus Matheus Baltis, Harold Sebastiaan Buddenberg, Giovanni Luca Gattobigio, Johannes Cornelius Paulus Melman, Günes NAKIBOGLU +6 more |
2020-02-25 |
| 10317804 |
Substrate table, lithographic apparatus and method of operating a lithographic apparatus |
Coen Hubertus Matheus Baltis, Harold Sebastiaan Buddenberg, Giovanni Luca Gattobigio, Johannes Cornelis Paulus Melman, Günes NAKIBOGLU +6 more |
2019-06-11 |
| 10216100 |
Inspection substrate and an inspection method |
Seerwan Saeed, Petrus Martinus Gerardus Johannes Arts, Harold Sebastiaan Buddenberg, Erik Henricus Egidius Catharina Eummelen, Giovanni Luca Gattobigio +8 more |
2019-02-26 |
| 10120290 |
Fluid handling structure, immersion lithographic apparatus, and device manufacturing method |
Bruno Jean François FRACKOWIAK, Arend Koolma |
2018-11-06 |
| 9798253 |
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method |
Thomas POIESZ |
2017-10-24 |