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Patterning device cooling apparatus |
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Substrate holder, a lithographic apparatus and method of manufacturing devices |
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Radiation shielding device and apparatus comprising such shielding device |
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Substrate table, a lithographic apparatus and a method of operating a lithographic apparatus |
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Lithographic apparatus and device manufacturing method |
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2019-12-03 |
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Lithographic apparatus and method |
Suzanne Johanna Antonetta Geertruda Cosijns, Anne Willemijn Bertine Quist, Lukasz Sosniak, Frank Johannes Jacobus Van Boxtel, Engelbertus Antonius Fransiscus Van Der Pasch |
2019-07-09 |
| 10317804 |
Substrate table, lithographic apparatus and method of operating a lithographic apparatus |
Daan Daniel Johannes Antonius Van Sommeren, Coen Hubertus Matheus Baltis, Harold Sebastiaan Buddenberg, Giovanni Luca Gattobigio, Johannes Cornelis Paulus Melman +6 more |
2019-06-11 |
| 10241422 |
Lithography apparatus and a method of manufacturing a device |
— |
2019-03-26 |
| 10222713 |
Patterning device cooling apparatus |
Laurentius Johannes Adrianus Van Bokhoven, Ruud Hendrikus Martinus Johannes Bloks, Marinus Jan Remie, Johan Gertrudis Cornelis Kunnen |
2019-03-05 |
| 10133197 |
Lithographic apparatus and device manufacturing method |
Frank Johannes Jacobus Van Boxtel, Thomas Petrus Hendricus Warmerdam, Jan Steven Christiaan Westerlaken, Johannes Pieter Kroes |
2018-11-20 |
| 10114295 |
Lithographic apparatus and device manufacturing method |
Jan Steven Christiaan Westerlaken, Frank Johannes Jacobus Van Boxtel, Maria del Carmen Mercado, Thibault Simon Mathieu Laurent |
2018-10-30 |
| 10114299 |
Lithographic apparatus |
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Lithographic apparatus and method |
Suzanne Johanna Antonetta Geertruda Cosijns, Anne Willemijn Bertine Quist, Lukasz Sosniak, Frank Johannes Jacobus Van Boxtel, Engelbertus Antonius Fransiscus Van Der Pasch |
2018-05-22 |
| 9939740 |
Lithographic apparatus and device manufacturing method |
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2018-04-10 |