Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12422758 | Lithographic apparatus, temperature sensor, and fiber Bragg grating sensor | Mahesh Ajgaonkar, Gerardus Hubertus Petrus Maria Swinkels, Laurentius Johannes Adrianus Van Bokhoven, Koen Martin Willem Jan BOS | 2025-09-23 |
| 12411424 | Temperature conditioning system, a lithographic apparatus and a method of temperature conditioning an object | Remco VAN DE MEERENDONK, Daniel Jozef Maria Direcks, Günes NAKIBOGLU, Nicholas Peter Waterson, Sven Pekelder +6 more | 2025-09-09 |
| 11143975 | Lithographic apparatus comprising an object with an upper layer having improved resistance to peeling off | Andrey Nikipelov, Vadim Yevgenyevich Banine, Maxim Aleksandrovich Nasalevich, Roland Johannes Wilhelmus Stas, Sando Wricke | 2021-10-12 |
| 10976196 | Sensor mark and a method of manufacturing a sensor mark | Vadim Yevgenyevich Banine, Johan Franciscus Maria Beckers, Madhusudhanan Jambunathan, Maxim Aleksandrovich Nasalevich, Andrey Nikipelov +4 more | 2021-04-13 |