| 12411424 |
Temperature conditioning system, a lithographic apparatus and a method of temperature conditioning an object |
Remco VAN DE MEERENDONK, Günes NAKIBOGLU, Nicholas Peter Waterson, Joost André KLUGKIST, Sven Pekelder +6 more |
2025-09-09 |
| 11982947 |
Contamination trap |
Sander Catharina Reinier Derks, Maurice Wilhelmus Leonardus Hendricus Feijts, Pieter Gerardus Mathijs Hoeijmakers, Katja Cornelia Joanna Clasina Moors, Violeta Navarro Paredes +2 more |
2024-05-14 |
| 11556067 |
Contamination trap |
Sander Catharina Reinier Derks, Maurice Wilhelmus Leonardus Hendricus Feijts, Pieter Gerardus Mathijs Hoeijmakers, Katja Cornelia Joanna Clasina Moors, Violeta Navarro Paredes +2 more |
2023-01-17 |
| 11143968 |
Fluid handling structure, lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Nicolaas Rudolf Kemper, Danny Maria Hubertus Philips, Michel Riepen, Clemens Johannes Gerardus Van Den Dungen +2 more |
2021-10-12 |
| 10268127 |
Lithographic apparatus and device manufacturing method |
Michel Riepen, Christiaan Alexander Hoogendam, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons +11 more |
2019-04-23 |
| 9645506 |
Lithographic apparatus and device manufacturing method |
Michel Riepen, Christiaan Alexander Hoogendam, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons +11 more |
2017-05-09 |
| 9618835 |
Lithographic apparatus and a device manufacturing method involving an elongate liquid supply opening or an elongate region of relatively high pressure |
Erik Henricus Egidius Catharina Eummelen, Clemens Johannes Gerardus Van Den Dungen, Maikel Adrianus Cornelis Schepers, Sergei Shulepov, Pieter Mulder +2 more |
2017-04-11 |
| 9383654 |
Fluid handling structure, lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Nicolaas Rudolf Kemper, Danny Maria Hubertus Philips, Michel Riepen, Clemens Johannes Gerardus Van Den Dungen +2 more |
2016-07-05 |
| 8681308 |
Lithographic apparatus and device manufacturing method |
Paul Petrus Joannes Berkvens, Roelof Frederik De Graaf, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons +10 more |
2014-03-25 |
| 8638417 |
Fluid handling structure, lithographic apparatus and a device manufacturing method |
Danny Maria Hubertus Philips, Clemens Johannes Gerardus Van Den Dungen, Maikel Adrianus Cornelis Schepers, Paul Petrus Joannes Berkvens, Marcus Johannes Van Der Zanden +1 more |
2014-01-28 |
| 8634053 |
Lithographic apparatus and device manufacturing method |
Michel Riepen, Christiaan Alexander Hoogendam, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons +10 more |
2014-01-21 |
| 8472003 |
Fluid handling structure, lithographic apparatus and device manufacturing method |
Hrishikesh Patel, Johannes Henricus Wilhelmus Jacobs, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons +11 more |
2013-06-25 |
| 8421993 |
Fluid handling structure, lithographic apparatus and device manufacturing method |
Danny Maria Hubertus Philips, Clemens Johannes Gerardus Van Den Dungen, Maikel Adrianus Cornelis Schepers, Paul Petrus Joannes Berkvens, Koen Steffens +1 more |
2013-04-16 |
| 8405815 |
Fluid handling structure, lithographic apparatus and device manufacturing method |
Danny Maria Hubertus Philips, Maikel Adrianus Cornelis Schepers, Paul Petrus Joannes Berkvens |
2013-03-26 |
| 8351018 |
Fluid handling structure, lithographic apparatus and device manufacturing method |
Danny Maria Hubertus Philips, Clemens Johannes Gerardus Van Den Dungen, Koen Steffens, Arnold Jan Van Putten |
2013-01-08 |
| 8345218 |
Immersion lithographic apparatus, drying device, immersion metrology apparatus and device manufacturing method |
Michel Riepen, Nicolaas Rudolf Kemper, Johannes Petrus Martinus Bernardus Vermeulen, Danny Maria Hubertus Philips, Arnold Jan Van Putten |
2013-01-01 |
| 8259283 |
Immersion lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons, Danny Maria Hubertus Philips +5 more |
2012-09-04 |
| 8218126 |
Lithographic apparatus and device manufacturing method |
Koen Steffens, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Gert-Jan Gerardus Johannes Thomas Brands |
2012-07-10 |
| 7561250 |
Lithographic apparatus having parts with a coated film adhered thereto |
Paulus Martinus Maria Liebregts, Menno Fien, Erik Roelof Loopstra, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons +3 more |
2009-07-14 |