| 10268127 |
Lithographic apparatus and device manufacturing method |
Michel Riepen, Christiaan Alexander Hoogendam, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons +11 more |
2019-04-23 |
| 9645506 |
Lithographic apparatus and device manufacturing method |
Michel Riepen, Christiaan Alexander Hoogendam, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons +11 more |
2017-05-09 |
| 8780321 |
Lithographic apparatus and device manufacturing method |
Thijs Egidius Johannes Knaapen, Richard Joseph Bruls, Youri Johannes Laurentius Maria Van Dommelen, Johannes Henricus Wilhelmus Jacobs, Martijn Hendrik Kamphuis +10 more |
2014-07-15 |
| 8681308 |
Lithographic apparatus and device manufacturing method |
Paul Petrus Joannes Berkvens, Roelof Frederik De Graaf, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons +10 more |
2014-03-25 |
| 8634053 |
Lithographic apparatus and device manufacturing method |
Michel Riepen, Christiaan Alexander Hoogendam, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons +10 more |
2014-01-21 |
| 8472003 |
Fluid handling structure, lithographic apparatus and device manufacturing method |
Hrishikesh Patel, Johannes Henricus Wilhelmus Jacobs, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons +11 more |
2013-06-25 |
| 8405817 |
Lithographic apparatus, a method of controlling the apparatus and a device manufacturing method |
Marco Koert Stavenga, Nicolaas Rudolf Kemper, Martinus Hendrikus Antonius Leenders, Paulus Martinus Maria Liebregts, Johannes Catharinus Hubertus Mulkens +16 more |
2013-03-26 |
| 8259283 |
Immersion lithographic apparatus and device manufacturing method |
Daniel Jozef Maria Direcks, Nicolaas Rudolf Kemper, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons +5 more |
2012-09-04 |
| 8218126 |
Lithographic apparatus and device manufacturing method |
Koen Steffens, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Daniel Jozef Maria Direcks |
2012-07-10 |
| 7561250 |
Lithographic apparatus having parts with a coated film adhered thereto |
Paulus Martinus Maria Liebregts, Menno Fien, Erik Roelof Loopstra, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons +3 more |
2009-07-14 |