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Support apparatus, lithographic apparatus and device manufacturing method |
Raymond Wilhelmus Louis Lafarre, Adrianus Hendrik Koevoets, Sjoerd Nicolaas Lambertus Donders, Antonius Franciscus Johannes De Groot, Christiaan Alexander Hoogendam +6 more |
2020-08-18 |
| 10120292 |
Support apparatus, lithographic apparatus and device manufacturing method |
Raymond Wilhelmus Louis Lafarre, Adrianus Hendrik Koevoets, Sjoerd Nicolaas Lambertus Donders, Antonius Franciscus Johannes De Groot, Christiaan Alexander Hoogendam +6 more |
2018-11-06 |
| 9507275 |
Support apparatus, lithographic apparatus and device manufacturing method |
Raymond Wilhelmus Louis Lafarre, Adrianus Hendrik Koevoets, Sjoerd Nicolaas Lambertus Donders, Antonius Franciscus Johannes De Groot, Christiaan Alexander Hoogendam +6 more |
2016-11-29 |
| 7561250 |
Lithographic apparatus having parts with a coated film adhered thereto |
Paulus Martinus Maria Liebregts, Erik Roelof Loopstra, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons, Daniel Jozef Maria Direcks +3 more |
2009-07-14 |
| 7148950 |
Lithographic apparatus and device manufacturing method |
Evert Hendrik Jan Draaijer, Martinus Agnes Willem Cuijpers, Marcus Joseph Elisabeth Godfried Breukers, Martijn Houkes, Edwin Teunis Van Donkelaar |
2006-12-12 |
| 6721036 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
Arie Cornelis Scheiberlich, Evert Hendrik Jan Draaijer |
2004-04-13 |