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Reticle gripper damper and isolation system for lithographic apparatuses |
Roberto B. Wiener, Peter Kochersperger, Boris Kogan, Robert Wade, Shaun Evans |
2025-01-07 |
| 10747127 |
Lithographic apparatus |
Frits Van Der Meulen, Erik Johan Arlemark, Hendrikus Herman Marie Cox, Joost DE HOOGH, Gosse Charles De Vries +17 more |
2020-08-18 |
| 9575416 |
Lithographic apparatus, device manufacturing method and displacement measurement system |
Engelbertus Antonius Fransiscus Van Der Pasch, Ruud Antonius Catharina Maria Beerens, Christiaan Alexander Hoogendam, Fransiscus Mathijs Jacobs, Willem Herman Gertruda Anna Koenen +1 more |
2017-02-21 |
| 9122173 |
Positioning system, lithographic apparatus and device manufacturing method |
Hans Butler, Christiaan Alexander Hoogendam, Robertus Johannes Marinus De Jongh, Michael Jozef Mathijs Renkens, Marc Wilhelmus Maria Van Der Wijst +4 more |
2015-09-01 |
| 8913228 |
Lithographic apparatus and device manufacturing method |
Maurice Willem Jozef Etiënne Wijckmans, Martinus Hendrikus Antonius Leenders, Frits Van Der Meulen, Joost Jeroen Ottens, Theodorus Petrus Maria Cadee +7 more |
2014-12-16 |
| 8797504 |
Lithographic apparatus and device manufacturing method |
Han-Kwang Nienhuys, Leon Martin Levasier, Jan Bernard Plechelmus Van Schoot, Yuri Johannes Gabriël Van De Vijver, Oleg Viacheslavovich Voznyi +9 more |
2014-08-05 |
| 8773641 |
Leaf spring, stage system, and lithographic apparatus |
Christiaan Alexander Hoogendam, Bart Friso Riedstra, Ronald Cornelis Gerardus Gijzen, Maikel Cornelis Andreas Bruin |
2014-07-08 |
| 8730448 |
Lithographic apparatus and device manufacturing method |
Han-Kwang Nienhuys, Nicolaas Ten Kate, Leon Martin Levasier, Jan Bernard Plechelmus Van Schoot, Yuri Johannes Gabriël Van De Vijver +11 more |
2014-05-20 |
| 8144310 |
Positioning system, lithographic apparatus and device manufacturing method |
Hans Butler, Christiaan Alexander Hoogendam, Robertus Johannes Marinus De Jongh, Michael Jozef Mathijs Renkens, Marc Wilhelmus Maria Van Der Wijst +4 more |
2012-03-27 |
| 7755742 |
Lithographic apparatus with mounted sensor |
Sebastiaan Maria Johannes Cornelissen, Cornelis Christiaan Ottens, Peter Smits, Johannes Antonius Maria Van De Wal |
2010-07-13 |
| 7456527 |
Moveable object carrier, lithographic apparatus comprising the moveable object carrier and device manufacturing method |
— |
2008-11-25 |
| 7193722 |
Lithographic apparatus with disturbance correction system and device manufacturing method |
Martinus Godefridus Helena Boogaarts, Hans Butler, Henrikus Herman Marie Cox, Jan Jaap Kuit |
2007-03-20 |
| 7148950 |
Lithographic apparatus and device manufacturing method |
Evert Hendrik Jan Draaijer, Menno Fien, Marcus Joseph Elisabeth Godfried Breukers, Martijn Houkes, Edwin Teunis Van Donkelaar |
2006-12-12 |
| 7030967 |
Lithographic apparatus, device manufacturing method and substrate holder |
Robertus Nicodemus Jacobus Van Ballegoij, Pieter Johannes Gertrudis Meijers, Gerardus Petrus Matthijs Van Nunen, Joost Jeroen Ottens |
2006-04-18 |
| 6473161 |
Lithographic projection apparatus, supporting assembly and device manufacturing method |
Frank Auer, Robertus Nicodemus Jacobus Van Ballegoij |
2002-10-29 |