Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9977349 | Support device, lithographic apparatus and device manufacturing method | Hans Butler, Cornelius Adrianus Lambertus De Hoon, Ingmar August Kerp, Pieter Johannes Gertrudis Meijers, Jeroen Pieter Starreveld +4 more | 2018-05-22 |
| 7859644 | Lithographic apparatus, immersion projection apparatus and device manufacturing method | Jan-Gerard Cornelis Van Der Toorn, Hans Butler, Henrikus Herman Marie Cox, Nicolaas Ten Kate, Frits Van Der Meulen +4 more | 2010-12-28 |
| 7352436 | Lithographic apparatus, projection apparatus and device manufacturing method | Hans Butler, Marcus Joseph Elisabeth Godfried Breukers | 2008-04-01 |
| 7330238 | Lithographic apparatus, immersion projection apparatus and device manufacturing method | Jan-Gerard Cornelis Van Der Toorn, Hans Butler, Henrikus Herman Marie Cox, Nicolaas Ten Kate, Frits Van Der Meulen +4 more | 2008-02-12 |
| 7148950 | Lithographic apparatus and device manufacturing method | Martinus Agnes Willem Cuijpers, Menno Fien, Marcus Joseph Elisabeth Godfried Breukers, Martijn Houkes, Edwin Teunis Van Donkelaar | 2006-12-12 |
| 6721036 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Arie Cornelis Scheiberlich, Menno Fien | 2004-04-13 |