Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7774287 | System and method for moving a component through a setpoint profile, lithographic apparatus and device manufacturing method | Marcel François Heertjes, Yin Tim Tso | 2010-08-10 |
| 7289858 | Lithographic motion control system and method | Petrus Marinus Christianus Maria Van Den Biggelaar | 2007-10-30 |
| 7271917 | Lithographic apparatus, position quantity detection system and method | Evert Hendrink Jan Draaijer, Leon Martin Levasier, Nicolas Lallemant, Gerardus Martinus Antonius De Rooij | 2007-09-18 |
| 7148950 | Lithographic apparatus and device manufacturing method | Evert Hendrik Jan Draaijer, Martinus Agnes Willem Cuijpers, Menno Fien, Marcus Joseph Elisabeth Godfried Breukers, Martijn Houkes | 2006-12-12 |