| 10268128 |
Lithographic apparatus |
Franciscus Johannes Joseph Janssen, Johannes Paul Marie De La Rosette, Edwin Cornelis Kadijk, Jan Liefooghe, Markus Matthes +4 more |
2019-04-23 |
| 9482967 |
Lithographic apparatus, control system and device manufacturing method |
Marcus Adrianus Van De Kerkhof, Johannes Henricus Wilhelmus Jacobs, Tammo Uitterdijk |
2016-11-01 |
| 8045134 |
Lithographic apparatus, control system and device manufacturing method |
Marcus Adrianus Van De Kerkhof, Johannes Henricus Wilhelmus Jacobs, Tammo Uitterdijk |
2011-10-25 |
| 7557903 |
Lithographic apparatus and device manufacturing method |
Carolus Johannes Catharina Schoormans, Emiel Jozef Melanie Eussen, Willem Herman Gertruda Anna Koenen, Engelbertus Antonius Fransiscus Van Der Pasch, Johannes Mathias Theodorus Antonius Adriaens |
2009-07-07 |
| 7271873 |
Lithographic apparatus and device manufacturing method |
Martinus Cornelis Maria Verhagen, Marcel Beckers, Ronald Stultiens, Pascal Antonius Smits, Wladimir Fransiscus Hertog +3 more |
2007-09-18 |
| 7271917 |
Lithographic apparatus, position quantity detection system and method |
Edwin Teunis Van Donkelaar, Evert Hendrink Jan Draaijer, Leon Martin Levasier, Gerardus Martinus Antonius De Rooij |
2007-09-18 |
| 7148951 |
Lithographic apparatus |
Marcel Beckers, Stephan Koelink, Rob Jansen, Wladimir Fransiscus Hertog, David Theodorus Willy Van Der Plas |
2006-12-12 |
| 7072021 |
Lithographic apparatus and device manufacturing method |
Martinus Cornelis Maria Verhagen, Marcel Beckers, Ronald Stultiens, Pascal Antonius Smits, Wladimir Franciscus Gerardus Maria Hertog +3 more |
2006-07-04 |
| 7057702 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Johannes Catharinus Hubertus Mulkens, Jeroen Johannes Sophia Maria Mertens, Antonius Johannes Van Der Net, Ronald Van Der Ham +1 more |
2006-06-06 |