| 10802410 |
Lithographic apparatus and device manufacturing method involving a barrier structure to handle liquid |
Nicolaas Rudolf Kemper, Stefan Philip Christiaan Belfroid, Ferdy Migchelbrink, Sergei Shulepov |
2020-10-13 |
| 10649341 |
Lithographic apparatus |
Clemens Johannes Gerardus Van Den Dungen, Nicolaas Franciscus Koppelaars, Martinus Hendrikus Antonius Leenders, Paulus Martinus Maria Liebregts, Johannes Catharinus Hubertus Mulkens +7 more |
2020-05-12 |
| 10495984 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Nicolaas Rudolf Kemper +2 more |
2019-12-03 |
| 10209629 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Nicolaas Rudolf Kemper +2 more |
2019-02-19 |
| 10088755 |
Lithographic apparatus and device manufacturing method |
Marcus Adrianus Van De Kerkhof, Siebe Landheer, Jeroen Peter Johannes Bruijstens, Ivo Adam Johannes Thomas, Franciscus Johannes Joseph Janssen |
2018-10-02 |
| 10018925 |
Lithographic apparatus, drying device, metrology apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Nicolaas Ten Kate, Joost Jeroen Ottens, Marco Polizzi, Michel Riepen +4 more |
2018-07-10 |
| 9983489 |
Method for compensating for an exposure error, a device manufacturing method, a substrate table, a lithographic apparatus, a control system, a method for measuring reflectivity and a method for measuring a dose of EUV radiation |
Christianus Wilhelmus Johannes Berendsen, Henricus Jozef Castelijns, Hubertus Antonius Geraets, Adrianus Hendrik Koevoets, Leon Martin Levasier +3 more |
2018-05-29 |
| 9857695 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Nicolaas Rudolf Kemper +2 more |
2018-01-02 |
| 9715179 |
Lithographic apparatus and device manufacturing method |
Marcus Adrianus Van De Kerkhof, Siebe Landheer, Jeroen Peter Johannes Bruijstens, Ivo Adam Johannes Thomas, Franciscus Johannes Joseph Janssen |
2017-07-25 |
| 9606429 |
Lithographic apparatus, drying device, metrology apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Nicolaas Ten Kate, Joost Jeroen Ottens, Marco Polizzi, Michel Riepen +4 more |
2017-03-28 |
| 9477158 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Stefan Philip Christiaan Belfroid, Ferdy Migchelbrink, Sergei Shulepov |
2016-10-25 |
| 9465302 |
Lithographic apparatus |
Clemens Johannes Gerardus Van Den Dungen, Nicolaas Franciscus Koppelaars, Martinus Hendrikus Antonius Leenders, Paulus Martinus Maria Liebregts, Johannes Catharinus Hubertus Mulkens +7 more |
2016-10-11 |
| 9429853 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Nicolaas Rudolf Kemper +2 more |
2016-08-30 |
| 9182678 |
Lithographic apparatus and device manufacturing method |
Marcus Adrianus Van De Kerkhof, Siebe Landheer, Jeroen Peter Johannes Bruijstens, Ivo Adam Johannes Thomas, Franciscus Johannes Joseph Janssen |
2015-11-10 |
| 9036127 |
Lithographic apparatus |
Clemens Johannes Gerardus Van Den Dungen, Nicolaas Franciscus Koppelaars, Martinus Hendrikus Antonius Leenders, Paulus Martinus Maria Liebregts, Johannes Catharinus Hubertus Mulkens +7 more |
2015-05-19 |
| 8988651 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Nicolaas Rudolf Kemper +2 more |
2015-03-24 |
| 8976334 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Nicolaas Rudolf Kemper +2 more |
2015-03-10 |
| 8958054 |
Lithographic apparatus and device manufacturing method |
Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Ferdy Migchelbrink |
2015-02-17 |
| 8953142 |
Lithographic apparatus, drying device, metrology apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Nicolaas Ten Kate, Joost Jeroen Ottens, Marco Polizzi, Michel Riepen +4 more |
2015-02-10 |
| 8587762 |
Methods relating to immersion lithography and an immersion lithographic apparatus |
Bob Streefkerk, Roelof Frederik De Graaf, Johannes Catharinus Hubertus Mulkens, Paul Petrus Joannes Berkvens, David Lucien Anstotz |
2013-11-19 |
| 8462314 |
Lithographic apparatus and device manufacturing method |
Marcus Adrianus Van De Kerkhof, Siebe Landheer, Wouterus Johannes Petrus Maria Maas, Jeroen Peter Johannes Bruijstens, Ivo Adam Johannes Thomas +2 more |
2013-06-11 |
| 8451423 |
Lithographic apparatus and method |
Franciscus Johannes Joseph Janssen, Siebe Landheer, Yücel Kök, Ivo Adam Johannes Thomas, Marcio Alexandre Cano Miranda |
2013-05-28 |
| 8427629 |
Lithographic apparatus and device manufacturing method |
Carlo Cornelis Maria Luijten, Sjoerd Nicolaas Lambertus Donders, Nicolaas Rudolf Kemper, Martinus Hendrikus Antonius Leenders, Erik Roelof Loopstra +3 more |
2013-04-23 |
| 8421996 |
Lithographic apparatus |
Martinus Hendrikus Antonius Leenders, Nicolaas Ten Kate, Johannes Petrus Maria Smeulers, Michel Riepen, Sergei Shulepov +2 more |
2013-04-16 |
| 8259287 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Nicolaas Rudolf Kemper +2 more |
2012-09-04 |