Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9268236 | Lithographic apparatus and device manufacturing method having heat pipe with fluid to cool substrate and/or substrate holder | Johannes Henricus Wilhelmus Jacobs, Igor Petrus Maria Bouchoms, Nicolaas Rudolf Kemper, Nicolaas Ten Kate, Martinus Hendrikus Antonius Leenders +6 more | 2016-02-23 |
| 8451423 | Lithographic apparatus and method | Franciscus Johannes Joseph Janssen, Siebe Landheer, Marcel Beckers, Ivo Adam Johannes Thomas, Marcio Alexandre Cano Miranda | 2013-05-28 |
| 7751027 | Lithographic apparatus and device manufacturing method | Johannes Henricus Wilhelmus Jacobs, Igor Petrus Maria Bouchoms, Nicolaas Ten Kate, Nicolaas Rudolf Kemper, Martinus Hendrikus Antonius Leenders +6 more | 2010-07-06 |